- 专利标题: METHOD OF FORMING MEMORY DEVICE
-
申请号: US18757483申请日: 2024-06-27
-
公开(公告)号: US20240357826A1公开(公告)日: 2024-10-24
- 发明人: Chao-I Wu , Yu-Ming Lin , Sai-Hooi Yeong , Han-Jong Chia
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 分案原申请号: US17086463 2020.11.02
- 主分类号: H10B51/10
- IPC分类号: H10B51/10 ; H01L21/28 ; H01L23/522 ; H01L29/51 ; H01L29/66 ; H01L29/78 ; H10B51/20 ; H10B51/30
摘要:
Provided are a memory device and a method of forming the same. The memory device includes a first tier on a substrate and a second tier on the first tier. The first tier includes a first layer stack; a first gate electrode penetrating through the first layer stack; a first channel layer between the first layer stack and the first gate electrode; and a first ferroelectric layer between the first channel layer and the first gate electrode. The second tier includes a second layer stack; a second gate electrode penetrating through the second layer stack; a second channel layer between the second layer stack and the second gate electrode; and a second ferroelectric layer between the second channel layer and the second gate electrode.
信息查询