Invention Publication
- Patent Title: DIELECTRIC SIDEWALL STRUCTURE FOR QUALITY IMPROVEMENT IN GE AND SIGE DEVICES
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Application No.: US18764436Application Date: 2024-07-05
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Publication No.: US20240363777A1Publication Date: 2024-10-31
- Inventor: Chih-Ming Chen , Lee-Chuan Tseng , Ming Chyi Liu , Po-Chun Liu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- The original application number of the division: US15273880 2016.09.23
- Main IPC: H01L31/0352
- IPC: H01L31/0352 ; H01L31/02 ; H01L31/0216 ; H01L31/028 ; H01L31/0312 ; H01L31/103 ; H01L31/105 ; H01L31/18

Abstract:
Some embodiments relate to an integrated circuit (IC) disposed on a silicon substrate, which includes a well region having a first conductivity type. An epitaxial pillar of SiGe or Ge extends upward from the well region. The epitaxial pillar includes a lower epitaxial region having the first conductivity type and an upper epitaxial region having a second conductivity type, which is opposite the first conductivity type. A dielectric layer is arranged over an upper surface of the substrate and is disposed around the lower epitaxial region to extend over outer edges of the well region. The dielectric layer has inner sidewalls that contact outer sidewalls of the epitaxial pillar. A dielectric sidewall structure has a bottom surface that rests on an upper surface of the dielectric layer and has inner sidewalls that extend continuously from the upper surface of the dielectric layer to a top surface of the epitaxial pillar.
Information query
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