Described herein is methacrylate copolymer derived from: a (meth)acrylate monomer comprising a second terminal olefin group; an alkyl methacrylate monomer wherein the alkyl group comprises 1 to 4 carbon atoms; a mono(meth)acrylate monomer comprising a low-surface-energy group, wherein the low-surface-energy group comprises a perfluorinated alkyl group, a perfluorinated polyether group, or a silicone group; and a RAFT agent. Such copolymers can be used to make liquid compositions, which may then be used to generate tooling for nanoimprint or transfer lithography.