Invention Application
- Patent Title: METHOD FOR FORMING PROGRAMMABLE MEMORY
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Application No.: US18792499Application Date: 2024-08-01
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Publication No.: US20240397712A1Publication Date: 2024-11-28
- Inventor: Hsueh-Chun Hsiao , Yi-Ning Peng , Tzu-Yun Chang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu City
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu City
- Priority: TW110122630 20210621
- Main IPC: H10B41/30
- IPC: H10B41/30 ; H01L21/28 ; H01L29/423 ; H01L29/66 ; H01L29/78 ; H01L29/788

Abstract:
An array of programmable memory includes a first floating gate and a second floating gate disposed on a substrate along a first direction, two spacers disposed between and parallel to the first floating gate and the second floating gate, a first word line sandwiched by one of the spacers and the adjacent first floating gate, and a second word line sandwiched by the other one of the spacers and the adjacent second floating gate, and two first spacers disposed on the substrate, wherein one of the first spacer is disposed between the first word line and the first floating gate, and another spacer is disposed between the second word line and the second floating gate, wherein each spacer has substantially the same shape as each first spacer.
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