Invention Application
- Patent Title: DEVELOPING APPARATUS, SUBSTRATE TREATMENT SYSTEM, AND DEVELOPING METHOD
-
Application No.: US18673751Application Date: 2024-05-24
-
Publication No.: US20240402609A1Publication Date: 2024-12-05
- Inventor: Kenji IIZUKA , Koji USHIMARU , Kazuhiko OOSHIMA , Kei MIYAZAKI , Yuichi TERASHITA , Yukinobu OTSUKA , Katsuhiro IKEDA , Ryohei FUJISE
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Priority: JP2023-090750 20230601,JP2024-064700 20240412
- Main IPC: G03F7/36
- IPC: G03F7/36 ; G03F7/00

Abstract:
A developing apparatus for developing a substrate having a coating film of a metal-containing resist formed thereon, includes: a heating part configured to support and heat the substrate; a chamber configured to cover the heating part and form a treatment space above the heating part; a gas supplier to which a developing gas containing acid is supplied; and a dispersion mechanism configured to disperse the developing gas supplied to the gas supplier and discharge the developing gas to the treatment space from a plurality of discharge ports formed at positions above the heating part.
Information query
IPC分类: