Invention Application
- Patent Title: Reference Box for Direct-Drive Radiofrequency Power Supply
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Application No.: US18689017Application Date: 2022-09-13
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Publication No.: US20240404804A1Publication Date: 2024-12-05
- Inventor: Alexander Miller Paterson , Daniel Guzman , William T. Hart , Cristian Siladie , Michael John Martin , Yuhou Wang , Michael Drymon , John Drewery , Robert Griffith O'Neill , Luc Albarede , Neil Simon Ocampo
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- International Application: PCT/US2022/043393 WO 20220913
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/34

Abstract:
A radiofrequency calibration system for a direct-drive radiofrequency power supply includes a reference box that includes a reference circuit for converting a non-reference input impedance to a reference output impedance. The reference box has an input connector electrically connected to a radiofrequency output coupling of the direct-drive radiofrequency power supply. A radiofrequency power meter has a radiofrequency power input electrically connected to an output connector of the reference box. The radiofrequency power meter has an input impedance and an output impedance that substantially match the reference output impedance of the reference box. A cable has a first end electrically connected to a radiofrequency power output of the radiofrequency power meter and a second end connected to a test load that has an impedance that substantially matches the reference output impedance of the reference box. A controller is connected in data communication with a data interface of the radiofrequency power meter.
Public/Granted literature
- US1245836A Headlight-lens. Public/Granted day:1917-11-06
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