发明授权
- 专利标题： Method for forming a fine pattern of an aluminum film
- 专利标题（中）： 形成铝膜精细图案的方法
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申请号： US190286申请日： 1980-09-24
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公开(公告)号： US4314874A公开(公告)日： 1982-02-09
- 发明人: Haruhiko Abe , Yoji Mashiko , Hiroshi Harada , Sotoju Asai , Kazuo Mizuguchi , Sumio Nomoto
- 申请人： Haruhiko Abe , Yoji Mashiko , Hiroshi Harada , Sotoju Asai , Kazuo Mizuguchi , Sumio Nomoto
- 申请人地址： JPX Tokyo
- 专利权人： Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人： Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX54/130391 19791009
- 主分类号： C23F4/00
- IPC分类号： C23F4/00 ; H01L21/302 ; H01L21/3065 ; H01L21/316 ; H01L21/3213 ; H01L21/3215 ; C23F1/02
摘要：
A thin aluminum film 3 is formed on the top surface of a substrate 2, 1. Selected areas of the aluminum film are irradiated by an oxygen ion beam 6 to form implanted regions 7. The surface is then plasma etched, with the oxygen ion implanted regions serving as a mask to thereby prevent the removal of the underlying areas of the aluminum film.
公开/授权文献
- US5582048A Spare tire security device 公开/授权日：1996-12-10
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