发明授权
- 专利标题: MOS Dynamic RAM cell and method of fabrication
- 专利标题(中): MOS动态RAM单元及其制造方法
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申请号: US403116申请日: 1982-07-29
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公开(公告)号: US4409259A公开(公告)日: 1983-10-11
- 发明人: Mark T. Bohr , Kenneth K. Yu , Ronald J. C. Chwang , C. Neil Berglund
- 申请人: Mark T. Bohr , Kenneth K. Yu , Ronald J. C. Chwang , C. Neil Berglund
- 申请人地址: CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: CA Santa Clara
- 主分类号: G11C5/00
- IPC分类号: G11C5/00 ; G11C11/404 ; H01L23/556 ; H01L27/108 ; H01L29/78 ; B05D5/12 ; H01L27/02
摘要:
A high density CMOS dynamic RAM cell comprising a transistor and capacitance means formed in an n-well is disclosed. The capacitance means includes a polysilicon plate member disposed above a p-type region formed in the n-well. A buried contact, extending from the plate member, pierces the p-type region and contacts the well. In addition to the capacitance associated with the plate member, p-type region and well, capacitance is obtained between the side walls of the n-type regions and p-type regions.
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