发明授权
US4476545A Dynamic semiconductor memory cell with random access and method for its
production
失效
具有随机存取的动态半导体存储单元及其生产方法
- 专利标题: Dynamic semiconductor memory cell with random access and method for its production
- 专利标题(中): 具有随机存取的动态半导体存储单元及其生产方法
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申请号: US315358申请日: 1981-10-27
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公开(公告)号: US4476545A公开(公告)日: 1984-10-09
- 发明人: Wolfgang Mueller
- 申请人: Wolfgang Mueller
- 申请人地址: DEX Berlin & Munich
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DEX Berlin & Munich
- 优先权: DEX3044132 19801124
- 主分类号: H01L27/10
- IPC分类号: H01L27/10 ; H01L21/765 ; H01L21/8242 ; H01L27/108 ; H01L29/78 ; G11C13/00 ; G11C11/40
摘要:
A RAM memory cell in double polysilicon technology having improved packing density is attained by insulating neighboring active memory regions under a first polysilicon plane by ion implantation to increase the substrate doping of the surface of the semiconductor body whereby field shield insulation regions are generated by a transistor in the off-state and the memory regions are rendered self-conducting by the ion implantation so that with a voltage at the polysilicon-1-electrode of 0 volts, the full operating voltage can be written into the memory capacitor.
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