发明授权
US4476545A Dynamic semiconductor memory cell with random access and method for its production 失效
具有随机存取的动态半导体存储单元及其生产方法

Dynamic semiconductor memory cell with random access and method for its
production
摘要:
A RAM memory cell in double polysilicon technology having improved packing density is attained by insulating neighboring active memory regions under a first polysilicon plane by ion implantation to increase the substrate doping of the surface of the semiconductor body whereby field shield insulation regions are generated by a transistor in the off-state and the memory regions are rendered self-conducting by the ion implantation so that with a voltage at the polysilicon-1-electrode of 0 volts, the full operating voltage can be written into the memory capacitor.
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