发明授权
- 专利标题： Probe apparatus
- 专利标题（中）： 探头设备
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申请号： US634814申请日： 1990-12-31
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公开(公告)号： US5086270A公开(公告)日： 1992-02-04
- 发明人: Wataru Karasawa , Taketoshi Itoyama , Itaru Takao , Tadashi Obikane , Hisashi Koike
- 申请人： Wataru Karasawa , Taketoshi Itoyama , Itaru Takao , Tadashi Obikane , Hisashi Koike
- 申请人地址： JPX Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX63-171570 19880708
- 主分类号： H01L21/66
- IPC分类号： H01L21/66 ; G01R1/04 ; G01R1/067
摘要：
A probe apparatus having a measuring section with a first system for electrically measuring an object. A loader section has a second system for carrying objects to the measuring section and a marking section has a third system for marking objects. These sections are independent of each other so that a vibration occurring in one section is not transmitted to the other sections.
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