发明授权
- 专利标题: Method of fabricating metallized chip carriers from wafer-shaped substrates
- 专利标题(中): 从成形衬底制造金属化芯片载体的方法
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申请号: US506729申请日: 1990-04-09
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公开(公告)号: US5182420A公开(公告)日: 1993-01-26
- 发明人: Richard R. Steitz , Diane M. Christie , Eugene F. Neumann , Melvin C. August , Stephen Nelson
- 申请人: Richard R. Steitz , Diane M. Christie , Eugene F. Neumann , Melvin C. August , Stephen Nelson
- 申请人地址: MN Eagan
- 专利权人: Cray Research, Inc.
- 当前专利权人: Cray Research, Inc.
- 当前专利权人地址: MN Eagan
- 主分类号: H01L21/48
- IPC分类号: H01L21/48 ; H01L23/13 ; H01L23/498 ; H01L23/538
摘要:
A method for simultaneously manufacturing metallized carriers from wafer-shaped substrates is described, wherein such wafer-shaped substrates permit the use of standard IC fabrication apparatus and methods. As a result, very thin and finely dimensioned traces can be deposited. Thin-film manufacturing techniques are used to create the high-density traces on the surface of the chip carriers, thereby permitting direct connections from the IC to the periphery of the carrier without the need for vias. A lid hermetically seals and protects the package. The traces are comprised of a plurality of metals to facilitate bonding, each of the metals homogeneous for a portion of the trace. One metal portion of the trace is of a type compatible with an IC chip placed in the carrier. Another metal portion of the trace is of a type compatible with a trace on a printed circuit board. A metal barrier is interposed between the metals to prevent metal diffusion from one metal to an adjoining portion of another metal.
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