发明授权
US5258321A Manufacturing method for semiconductor memory device having stacked
trench capacitors and improved intercell isolation
失效
具有层叠沟槽电容器和改进的晶胞间隔离的半导体存储器件的制造方法
- 专利标题: Manufacturing method for semiconductor memory device having stacked trench capacitors and improved intercell isolation
- 专利标题(中): 具有层叠沟槽电容器和改进的晶胞间隔离的半导体存储器件的制造方法
-
申请号: US896872申请日: 1992-06-10
-
公开(公告)号: US5258321A公开(公告)日: 1993-11-02
- 发明人: Masahiro Shimizu , Katsuhiro Tsukamoto , Masahide Inuishi
- 申请人: Masahiro Shimizu , Katsuhiro Tsukamoto , Masahide Inuishi
- 申请人地址: JPX Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX63-7313 19880114
- 主分类号: H01L21/8242
- IPC分类号: H01L21/8242 ; H01L27/108 ; H01L21/70
摘要:
A semiconductor memory device having memory cells formed adjacent to each other comprises a P type semiconductor substrate having adjacent two trenches, a P.sup.+ impurity region formed in the side portions and the bottom portions of the trenches, n type first polysilicon layers serving as common electrodes formed in the upper portion of the P.sup.+ impurity region through an insulating film, second polysilicon layers formed inside and in the upper portion of the trenches formed of the first polysilicon layers through an insulating film, and a third polysilicon layer formed on the second polysilicon layers, only the third polysilicon layer constituting a connecting electrode between the adjacent memory cells.
公开/授权文献
信息查询
IPC分类: