发明授权
- 专利标题： Method of forming a thin electroconductive film
- 专利标题（中）： 形成薄导电膜的方法
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申请号： US867202申请日： 1992-06-30
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公开(公告)号： US5266244A公开(公告)日： 1993-11-30
- 发明人: Akira Yabe , Hiroyuki Niino , Masashi Shimoyama
- 申请人： Akira Yabe , Hiroyuki Niino , Masashi Shimoyama
- 申请人地址： JPX Tokyo JPX Tokyo
- 专利权人： Ebara Corporation,Japan as Represented by Director General of Agency of Industrial Science and Technology
- 当前专利权人： Ebara Corporation,Japan as Represented by Director General of Agency of Industrial Science and Technology
- 当前专利权人地址： JPX Tokyo JPX Tokyo
- 优先权： JPX2-57982 19900312
- 主分类号： B01J19/12
- IPC分类号： B01J19/12 ; B23K26/00 ; B29C35/08 ; B29C59/16 ; B29C70/88 ; C08J5/18 ; C08J7/00 ; H01B1/12 ; H01B13/00
摘要：
A thin electroconductive film is formed by irradiating a shaped article of chlorinated vinyl polymer with a pulsive light having a pulse duration of not greater than 100 nsec., a fluence of above about 15 mJ/cm.sup.2 /pulse and below that at which the polymer is subject to ablation, a laser wavelength of from about 190 to about 300 nm, and repetition frequency of above about 1 Hz and below that at which the polymer is subject to deformation and/or decomposition by a regenerative function of irradiation, under vacuum or in an oxygen-free atmosphere, thereby irradiating the article with total photon numbers of at least 1.times.10.sup.18 /cm.sup.2 without causing photocrosslinking, oxidation or cleavage of the backbone chain. The invention does not use materials other than the starting polymer such as solvents or strong bases that can contaminate the thin film during a dehydrochlorination, so there is no need to remove solvents after reaction and no residual salts will be formed in the dehydrochlorination.