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US5278510A Ionization vacuum gauge using a cold micropoint cathode 失效
电离真空计使用冷微点阴极

Ionization vacuum gauge using a cold micropoint cathode
Abstract:
Ionization vacuum gauge comprising, like Bayard Alpert gauges, in a chamber (1) containing an extremely low pressure atmosphere, whose ultra-vacuum degree it is desired to be measured, an electron source cathode (2), a grid (3) for collecting these electrons and surrounding a collector (4) of ions resulting from the impact of the electrons on the gas molecules of the extremely low pressure atmosphere, wherein the electron source is a cold micropoint cathode.
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