Invention Grant
US5300814A Semiconductor device having a semiconductor substrate with reduced step
between memory cells
失效
半导体器件具有在存储单元之间具有减小的步骤的半导体衬底
- Patent Title: Semiconductor device having a semiconductor substrate with reduced step between memory cells
- Patent Title (中): 半导体器件具有在存储单元之间具有减小的步骤的半导体衬底
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Application No.: US915898Application Date: 1992-07-17
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Publication No.: US5300814APublication Date: 1994-04-05
- Inventor: Susumu Matsumoto , Shin Hashimoto , Toshio Yamada , Yoshiro Nakata
- Applicant: Susumu Matsumoto , Shin Hashimoto , Toshio Yamada , Yoshiro Nakata
- Applicant Address: JPX Osaka
- Assignee: Matsushita Electric Industrial Co., Ltd.
- Current Assignee: Matsushita Electric Industrial Co., Ltd.
- Current Assignee Address: JPX Osaka
- Priority: JPX3-178080 19910718
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/8242 ; H01L23/522 ; H01L23/528 ; H01L27/10 ; H01L27/105 ; H01L27/108 ; H01L23/48 ; H01L29/46
Abstract:
A semiconductor device comprising a semiconductor substrate, a plurality of memory cell regions each having a plurality of memory cells disposed on the semiconductor substrate, a word line formed in a first level above the semiconductor substrate, a bit line formed in a second level above the first level, and a backing line having a lower resistance than the word line and formed in a third level above the second level. A dummy bit line is formed in the second level outside the memory cell region so as to reduce the step formed at the periphery of the memory cell region. The dummy bit line is also used to interconnect the word line and the backing line so that an electrical connection therebetween is stabilized.
Public/Granted literature
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