发明授权
US5302545A Method of making charge-coupled device and solid-state imaging device
having an ONO transfer gate insulating film
失效
制造电荷耦合器件的方法和具有ONO转移栅绝缘膜的固态成像器件
- 专利标题: Method of making charge-coupled device and solid-state imaging device having an ONO transfer gate insulating film
- 专利标题(中): 制造电荷耦合器件的方法和具有ONO转移栅绝缘膜的固态成像器件
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申请号: US73137申请日: 1993-06-07
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公开(公告)号: US5302545A公开(公告)日: 1994-04-12
- 发明人: Hiroyuki Okada , Wataru Kamisaka , Masaji Asaumi , Yuji Matsuda
- 申请人: Hiroyuki Okada , Wataru Kamisaka , Masaji Asaumi , Yuji Matsuda
- 申请人地址: JPX Kadoma
- 专利权人: Matsushita Electronics Corporation
- 当前专利权人: Matsushita Electronics Corporation
- 当前专利权人地址: JPX Kadoma
- 优先权: JPX2-324648 19901126
- 主分类号: H01L27/148
- IPC分类号: H01L27/148 ; H01L21/339
摘要:
A charge-coupled device comprises transfer gate electrodes separated from a substrate by a multilayer insulating film, and gate electrodes of MIS transistors separated from the substrate by a single layer insulating film. The multilayer insulating film comprising at least a lower silicon oxide layer of 10 nm to 200 nm thickness and an upper silicon nitride layer of 10 nm to 100 nm thickness. Since each of the gate insulating films of the MIS transistors is the same layer as the lower silicon oxide layer, there occurs no degradation in the transistor characteristics due to the surface states or the trapping states present within the silicon nitride layer.
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