发明授权
US5338641A Positive-working radiation-sensitive mixture and copying material
produced therefrom comprising an .alpha.,.alpha.-bis(sulfonyl) diazo
methane as an acid forming compound
失效
由正极工作的辐射敏感性混合物和由其制备的复印材料包含作为酸形成化合物的α,α-双(磺酰基)重氮甲烷
- 专利标题: Positive-working radiation-sensitive mixture and copying material produced therefrom comprising an .alpha.,.alpha.-bis(sulfonyl) diazo methane as an acid forming compound
- 专利标题(中): 由正极工作的辐射敏感性混合物和由其制备的复印材料包含作为酸形成化合物的α,α-双(磺酰基)重氮甲烷
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申请号: US26077申请日: 1993-03-04
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公开(公告)号: US5338641A公开(公告)日: 1994-08-16
- 发明人: Georg Pawlowski , Hans-Joachim Merrem , Juergen Lingnau , Ralph Dammel , Horst Roeschert
- 申请人: Georg Pawlowski , Hans-Joachim Merrem , Juergen Lingnau , Ralph Dammel , Horst Roeschert
- 申请人地址: DEX Frankfurt am Main
- 专利权人: Hoechst Aktiengesellschaft
- 当前专利权人: Hoechst Aktiengesellschaft
- 当前专利权人地址: DEX Frankfurt am Main
- 优先权: DEX3930086 19890909
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; G03F7/004 ; G03F7/016 ; G03F7/075 ; H01L21/027 ; H01L21/30 ; G03F7/022 ; G03C1/76
摘要:
A positive-working radiation-sensitive mixture is disclosed which contains as essential constituents:a) an .alpha.,.alpha.-bis(sulfonyl)diazomethane, which forms a strong acid on irradiation, of the general formula ##STR1## in which R is an optionally substituted alkyl, cycloalkyl, aryl or heteroaryl radical,b) a compound having at least one C--O--C or C--O--Si--bond which can be cleaved by acid, andc) a water-insoluble binder which is soluble or at least swellable in aqueous alkaline solutions.The radiation-sensitive mixture according to the invention is notable for a high sensitivity over a wide spectral range. It also exhibits a high thermal stability and does not form any corrosive photolysis products on exposure to light.
公开/授权文献
- USD363308S Ball-point pen 公开/授权日:1995-10-17
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