发明授权
US5358824A Photosensitive resin composition utilizing 1,2-naphthoquinone diazide
compound having spirobichroman or spirobiindane ring
失效
利用具有螺二双胍或螺二茚环的1,2-萘醌二叠氮化合物的感光树脂组合物
- 专利标题: Photosensitive resin composition utilizing 1,2-naphthoquinone diazide compound having spirobichroman or spirobiindane ring
- 专利标题(中): 利用具有螺二双胍或螺二茚环的1,2-萘醌二叠氮化合物的感光树脂组合物
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申请号: US118590申请日: 1993-09-10
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公开(公告)号: US5358824A公开(公告)日: 1994-10-25
- 发明人: Shiro Tan , Yasunori Takata , Yoshimasa Aotani , Fumiyuki Nishiyama
- 申请人: Shiro Tan , Yasunori Takata , Yoshimasa Aotani , Fumiyuki Nishiyama
- 申请人地址: JPX Kanagawa
- 专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人地址: JPX Kanagawa
- 优先权: JPX4-243093 19920911
- 主分类号: G03F7/022
- IPC分类号: G03F7/022 ; H01L21/027 ; H01L21/30 ; G03F7/023
摘要:
The photosensitive resin composition of the present invention comprises an admixture of 5 to 100 weight parts of a photosensitive material having the following general formula (A) and 100 weight parts of an alkali-soluble resin:General formula (A) ##STR1## where R.sub.1 to R.sub.8 each independently represents a hydrogen atom, a hydroxyl group, a halogen atom, an alkyl group, an alkoxyl group, an aralkyl group, an aryl group, an amino group, a monoalkylamino group, a dialkylamino group, an acylamino group, an alkylcarbamoyl group, an arylcarbamoyl group, an alkylsulfamoyl group, an arylsulfamoyl group, a carboxyl group, a cyano group, a nitro group, an acyl group, an alkyloxycarbonyl group, an aryloxycarbonyl group, an acyloxy group, or --OD, --N(R)--D (where R represents a hydrogen atom or an alkyl group, and D represents a 1,2-napthoquinoediazide-5-sulfonyl group or a 1,2-napthoquinoediazide-4-sulfonyl group), and at least one of R.sub.1 to R.sub.8 represents --OD or --N(R)--D; R.sub.9 to R.sub.12 each independently represents a hydrogen atom, a lower alkyl group, or R.sub.9 and R.sub.10 and/or R.sub.11 and R.sub.12 may form a ring; R.sub.13 to R.sub.14 each independently represents a hydrogen atom, a lower alkyl group, or R.sub.13 or R.sub.14 and any of R.sub.15 or R.sub.16 may form a ring, whereas at least one of R.sub.13 to R.sub.16 is a substitution group other than hydrogen; and Z represents an oxygen atom or a single bond.
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