公开(公告)号：US5358824A

公开(公告)日：1994-10-25

申请号：US118590

申请日：1993-09-10

申请人： Shiro Tan ,  Yasunori Takata ,  Yoshimasa Aotani ,  Fumiyuki Nishiyama

发明人： Shiro Tan ,  Yasunori Takata ,  Yoshimasa Aotani ,  Fumiyuki Nishiyama

IPC分类号： G03F7/022 ,  H01L21/027 ,  H01L21/30 ,  G03F7/023

CPC分类号： G03F7/022

摘要： The photosensitive resin composition of the present invention comprises an admixture of 5 to 100 weight parts of a photosensitive material having the following general formula (A) and 100 weight parts of an alkali-soluble resin:General formula (A) ##STR1## where R.sub.1 to R.sub.8 each independently represents a hydrogen atom, a hydroxyl group, a halogen atom, an alkyl group, an alkoxyl group, an aralkyl group, an aryl group, an amino group, a monoalkylamino group, a dialkylamino group, an acylamino group, an alkylcarbamoyl group, an arylcarbamoyl group, an alkylsulfamoyl group, an arylsulfamoyl group, a carboxyl group, a cyano group, a nitro group, an acyl group, an alkyloxycarbonyl group, an aryloxycarbonyl group, an acyloxy group, or --OD, --N(R)--D (where R represents a hydrogen atom or an alkyl group, and D represents a 1,2-napthoquinoediazide-5-sulfonyl group or a 1,2-napthoquinoediazide-4-sulfonyl group), and at least one of R.sub.1 to R.sub.8 represents --OD or --N(R)--D; R.sub.9 to R.sub.12 each independently represents a hydrogen atom, a lower alkyl group, or R.sub.9 and R.sub.10 and/or R.sub.11 and R.sub.12 may form a ring; R.sub.13 to R.sub.14 each independently represents a hydrogen atom, a lower alkyl group, or R.sub.13 or R.sub.14 and any of R.sub.15 or R.sub.16 may form a ring, whereas at least one of R.sub.13 to R.sub.16 is a substitution group other than hydrogen; and Z represents an oxygen atom or a single bond.

摘要翻译： 本发明的感光性树脂组合物含有5〜100重量份的具有下列通式（A）的感光材料和100重量份碱溶性树脂的混合物：通式（A）表示氢原子， 羟基，卤素原子，烷基，烷氧基，芳烷基，芳基，氨基，单烷基氨基，二烷基氨基，酰氨基，烷基氨基甲酰基，芳基氨基甲酰基，烷基氨磺酰基 基团，芳基氨磺酰基，羧基，氰基，硝基，酰基，烷氧基羰基，芳氧基羰基，酰氧基或-OD，-N（R）-D（其中R表示 氢原子或烷基，D表示1,2-萘基叠氮基-5-磺酰基或1,2-萘醌亚叠氮基-4-磺酰基），R 1至R 8中的至少一个表示-OD或-N（ R）-D; R9至R12各自独立地表示氢原子，低级烷基或R9和R10和/或R11和R12可以形成环; R 13〜R 14各自独立地表示氢原子，低级烷基或R 13或R 14，R 15或R 16中的任一个可以形成环，而R 13〜R 16中的至少一个为氢以外的取代基。 Z表示氧原子或单键。

公开(公告)号：US06379860B1

公开(公告)日：2002-04-30

申请号：US09220682

申请日：1998-12-23

申请人： Toru Fujimori ,  Yasunori Takata ,  Shiro Tan ,  Toshiaki Aoai

发明人： Toru Fujimori ,  Yasunori Takata ,  Shiro Tan ,  Toshiaki Aoai

IPC分类号： G03F7004

CPC分类号： G03F7/0392 ,  G03F7/0397 ,  Y10S430/115

摘要： A positive photosensitive composition is disclosed which comprises a compound generating an acid upon irradiation with actinic rays or a radiation and a resin having groups which decompose by the action of an acid to enhance solubility in an alkaline developing solution, said resin being obtained by reacting an alkali-soluble resin having phenolic hydroxyl groups with at least one specific enol ether compound under acid conditions in a specific organic solvent. The positive photosensitive composition shows improved discrimination between nonimage areas and image areas, has high sensitivity, high resolving power, and high heat resistance, suffers little change in performance with the lapse of time from exposure to light to heat treatment (PED), and is free from defects, e.g., development defects.

摘要翻译： 公开了一种正型感光性组合物，其包含在用光化射线照射时产生酸的化合物或辐射，以及具有通过酸作用分解的基团的树脂，以增强在碱性显影液中的溶解度，所述树脂是通过使 具有酚羟基的碱溶性树脂与至少一种特定的烯醇醚化合物在酸性条件下在特定的有机溶剂中。 正型感光性组合物显示出非图像区域和图像区域之间的区分改善，具有高灵敏度，高分辨率和高耐热性，随着从曝光到热处理（PED）的时间的流逝，性能几乎没有变化，并且是 没有缺陷，例如发展缺陷。

公开(公告)号：US4925768A

公开(公告)日：1990-05-15

申请号：US364599

申请日：1989-06-12

申请人： Masayuki Iwasaki ,  Sadao Fujikura ,  Yuichi Wakata ,  Yasunori Takata

发明人： Masayuki Iwasaki ,  Sadao Fujikura ,  Yuichi Wakata ,  Yasunori Takata

IPC分类号： G03F7/032 ,  C08F2/50 ,  G03F7/027 ,  G03F7/033 ,  G03F7/038 ,  H01L21/027

CPC分类号： G03F7/033 ,  Y10S430/106 ,  Y10S430/111

摘要： A photopolymerizable composition comprising an addition polymerizable unsaturated compound having at least two ethylenically unsaturated double bonds in the molecule, a photopolymerization initiator, and a binder, wherein the binder is a tetrapolymer having a weight average molecular weight of from 10,000 to 50,000 represented by formula (I): ##STR1## wherein R represents a hydrogen atom or a methyl group; and w, x, y and z each represents mol percent (mol %), w ranging from about 45 to 65; x ranging from about 5 to 18; y ranging from about 2 to 10; and z ranging from about 20 to 40 and where C.sub.4 H.sub.9 (n) represents an n-butyl group. The photopolymerizable composition can be developed with a weakly alkaline aqueous solution, has sufficient flexibility to be laminated on a base as a dry film, high adhesiveness to a base and reduced surface tackiness. It resists cold flow during preservation, has excellent resistance to swelling by a developing solution after polymerization, and rapid releasability when treated with a dilute aqueous solution of a strong alkali containing no organic solvent, and forms an image faithful to the original with a high resolving power.

摘要翻译： 一种光聚合性组合物，其包含在分子中具有至少两个烯键式不饱和双键的加聚性不饱和化合物，光聚合引发剂和粘合剂，其中所述粘合剂是重均分子量为10,000〜50,000的由式（ I）：其中R表示氢原子或甲基;（I）其中R表示氢原子或甲基; 和w，x，y和z各自表示摩尔百分比（mol％），w为约45至65; x范围从5到18; y范围从2到10; 和z为约20至40，且其中C 4 H 9（n）表示正丁基。 可光聚合组合物可以用弱碱性水溶液显影，具有足够的柔软性，可以作为干膜层压在基材上，对基材的粘合性高，表面粘性降低。 它在保存过程中抵抗冷流，聚合后显影溶液具有优异的耐溶胀性，并且在用不含有机溶剂的强碱的稀水溶液处理时具有快速的脱模性，并以高分辨率形成忠实于原件的图像 功率。