发明授权
US5403437A Fluorosurfactant in photoresist for amorphous "Teflon" patterning
失效
无定形“特氟龙”图案的光致抗蚀剂中的含氟表面活性剂
- 专利标题: Fluorosurfactant in photoresist for amorphous "Teflon" patterning
- 专利标题(中): 无定形“特氟龙”图案的光致抗蚀剂中的含氟表面活性剂
-
申请号: US148773申请日: 1993-11-05
-
公开(公告)号: US5403437A公开(公告)日: 1995-04-04
- 发明人: Howard R. Beratan , Chih-Chen Cho , Scott R. Summerfelt
- 申请人: Howard R. Beratan , Chih-Chen Cho , Scott R. Summerfelt
- 申请人地址: TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: TX Dallas
- 主分类号: B05D1/40
- IPC分类号: B05D1/40 ; B05D7/00 ; B32B27/30 ; C09D127/12 ; G03F7/004 ; G03F7/085 ; H01L21/312 ; H01L21/822 ; H01L27/04 ; B44C1/22 ; B29C37/00
摘要:
This is a device and method of forming such, wherein the device has an amorphous "TEFLON" (TFE AF) layer. The method comprising: depositing an TFE AF layer 36 on a substrate; combining a fluorosurfactant with a first material to produce a second material 38; and depositing the second material 38 on the TFE AF layer 36. The method may include: patterning and etching the second material; removing the second material; and forming a third material 42 on the TFE AF layer 44. The third material may be a metal or a semiconductor. The ZFSNF fluorosurfactant may be combined with a photoresist and then patterned and etched. The TFE AF layer may also be heated. A second coating of the second material may also be added.
信息查询