发明授权
- 专利标题: Laser system and method for selectively severing links
- 专利标题(中): 用于选择性地切断链接的激光系统和方法
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申请号: US343778申请日: 1994-11-22
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公开(公告)号: US5473624A公开(公告)日: 1995-12-05
- 发明人: Yunlong Sun
- 申请人: Yunlong Sun
- 申请人地址: OR Portland
- 专利权人: Electro Scientific Industries, Inc.
- 当前专利权人: Electro Scientific Industries, Inc.
- 当前专利权人地址: OR Portland
- 主分类号: H01L27/04
- IPC分类号: H01L27/04 ; B23K26/00 ; B23K26/06 ; B23K26/36 ; H01L21/768 ; H01L21/82 ; H01L21/822 ; H01S3/0915 ; H01S3/13 ; H01S3/16 ; H01S3/09
摘要:
A laser system and processing method exploits the absorption contrast between the materials from which a link (12) and an underlying substrate (22) are made to effectively remove the link from the substrate. Laser output in a wavelength range of 1.2 to 3 .mu.m (30) optimizes the absorption contrast between many materials (e.g., metals, polysilicon, polycides, or disilicides) and integrated circuit substrates (e.g., silicon, gallium arsenide, or other semiconductors) and permits the use of laser output in a wider range of energy or power levels, pulse widths, and spot sizes without risking damage to the substrates or adjacent circuit structures. Existing link processing laser systems can be readily modified to operate in the 1.2 to 3 .mu.m range.
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