发明授权
US5503034A Force sensor, temperature sensor and temperature/force sensor device
失效
力传感器,温度传感器和温度/力传感器装置
- 专利标题: Force sensor, temperature sensor and temperature/force sensor device
- 专利标题(中): 力传感器,温度传感器和温度/力传感器装置
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申请号: US154025申请日: 1993-11-18
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公开(公告)号: US5503034A公开(公告)日: 1996-04-02
- 发明人: Akira Amano , Kazuo Matsuzaki , Toshiaki Sakai
- 申请人: Akira Amano , Kazuo Matsuzaki , Toshiaki Sakai
- 申请人地址: JPX Kanagawa
- 专利权人: Fuji Electric Co., Ltd.
- 当前专利权人: Fuji Electric Co., Ltd.
- 当前专利权人地址: JPX Kanagawa
- 优先权: JPX4-309921 19921119; JPX5-019965 19930208; JPX5-165269 19930705
- 主分类号: G01K5/28
- IPC分类号: G01K5/28 ; G01D5/48 ; G01L1/00 ; G01L1/18 ; G01L9/00 ; G01L11/00 ; G01P15/08
摘要:
A force sensor comprises a substrate having a movable unit which is displaceable in response to one of an applied force and acceleration; an electron emission unit having a cathode for emitting electrons in accordance with an applied potential; an electron absorption unit having an anode for capturing electrons emitted from the cathode, the electron emission unit and the electron absorption unit being formed on a surface of the substrate; and a control unit for, on the basis of the displacement of the movable unit, controlling the electron capturing efficiency of the anode with respect to electrons emitted from the cathode.
公开/授权文献
- US4819647A Intracochlear electrode array 公开/授权日:1989-04-11