发明授权
US5539613A Compact semiconductor device including a thin film capacitor of high
reliability
失效
紧凑型半导体器件包括具有高可靠性的薄膜电容器
- 专利标题： Compact semiconductor device including a thin film capacitor of high reliability
- 专利标题（中）： 紧凑型半导体器件包括具有高可靠性的薄膜电容器
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申请号： US73066申请日： 1993-06-08
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公开(公告)号： US5539613A公开(公告)日： 1996-07-23
- 发明人: Shintaro Yamamichi , Toshiyuki Sakuma , Yoichi Miyasaka
- 申请人： Shintaro Yamamichi , Toshiyuki Sakuma , Yoichi Miyasaka
- 申请人地址： JPX Tokyo
- 专利权人： NEC Corporation
- 当前专利权人： NEC Corporation
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX4-147020 19920608
- 主分类号： H01G4/33
- IPC分类号： H01G4/33 ; H01L21/02 ; H01L21/822 ; H01L21/8242 ; H01L27/04 ; H01L27/10 ; H01L27/108 ; H01L29/92
摘要：
In a semiconductor device which has a substrate, at least one thin film capacitor having a lower electrode layer deposited on the substrate, a dielectric layer overlaid on the lower electrode layer, and an upper electrode layer stacked on the dielectric layer, the lower electrode layer is surrounded by an insulator layer of Si.sub.3 N.sub.4.
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