Invention Grant
- Patent Title: Capacitive accelerometer sensor and method for its manufacture
- Patent Title (中): 电容式加速度传感器及其制造方法
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Application No.: US355760Application Date: 1994-12-14
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Publication No.: US5569852APublication Date: 1996-10-29
- Inventor: Jiri Marek , Frank Bantien , Horst Muenzel , Michael Offenberg
- Applicant: Jiri Marek , Frank Bantien , Horst Muenzel , Michael Offenberg
- Applicant Address: DEX Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DEX Stuttgart
- Priority: DEX4400127.4 19940105
- Main IPC: G01P15/08
- IPC: G01P15/08 ; G01P15/125 ; H01L29/84
Abstract:
A contacting of a capacitive accelerometer sensor of monocrystalline material is achieved by a capacitive accelerometer sensor having a structure etched out of a monocrystalline layer arranged on a substrate, including a seismic mass that is only joined to the substrate by suspension segments and executing a movement in its longitudinal direction in response to the occurrence of an acceleration of parallel, plate-like first fingers extending out from this mass at right angles to their longitudinal direction and of plate-like second fingers running parallel to the first fingers and anchored to the substrate. The first and second fingers form a capacitor arrangement. The suspension segments, which are anchored with their end region that is distant from the seismic mass to the substrate, and second fingers are electrically isolated, by an isolation strip, from the other remaining layer of monocrystalline material. A passivation layer extends over the isolation strip, and at least partially over the remaining layer. Conductors arranged on the passivation layer and serving as connecting leads for the capacitor arrangement extend across the isolation strip up to the connections of the capacitor arrangement, and are contacted there.
Information query
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