发明授权
US5608257A Fuse element for effective laser blow in an integrated circuit device
失效
用于在集成电路器件中有效激光吹扫的保险丝元件
- 专利标题： Fuse element for effective laser blow in an integrated circuit device
- 专利标题（中）： 用于在集成电路器件中有效激光吹扫的保险丝元件
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申请号： US477060申请日： 1995-06-07
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公开(公告)号： US5608257A公开(公告)日： 1997-03-04
- 发明人: Pei-Ing P. Lee , Frank Prein
- 申请人： Pei-Ing P. Lee , Frank Prein
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 主分类号： B23K26/00
- IPC分类号： B23K26/00 ; H01L21/302 ; H01L21/461 ; H01L21/82 ; H01L21/822 ; H01L21/8242 ; H01L23/525 ; H01L27/04 ; H01L27/108 ; H01L27/10 ; H01L29/00
摘要：
In an integrated circuit having interconnecting lines formed on an insulated layer deposited on a semiconductor substrate which provide connections between elements integral to the integrated circuit, a fuse structure programmable by a laser beam that includes: a melt-away elongated fuse link joining two segments of an interconnecting line; a plurality of fins integral and coplanar to the fuse link, each of the fins transversally extending away from the fuse link for absorbing energy emitted by the laser beam; and a reflecting plate positioned underneath the fuse link to reflect energy provided by the laser beam back into the fuse link, such that both the combination of the fins and the reflecting plate reduces the energy emitted by the laser beam required to blow the fuse structure.
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