发明授权
- 专利标题: Miniature probe positioning actuator
- 专利标题(中): 微型探头定位执行器
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申请号: US643523申请日: 1996-05-06
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公开(公告)号: US5635849A公开(公告)日: 1997-06-03
- 发明人: Jiann-Chang Lo , Michael Servedio , James M. Hammond , James E. Boyette, Jr. , Hans-George H. Kolan
- 申请人: Jiann-Chang Lo , Michael Servedio , James M. Hammond , James E. Boyette, Jr. , Hans-George H. Kolan
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: G01R31/26
- IPC分类号: G01R31/26 ; G01R1/067 ; G01R1/073 ; G01R31/28 ; H01L21/66 ; H02K41/03 ; G01R31/22
摘要:
Disclosed is a Probe Positioning Actuator which is low in cost and mass, capable of high accelerations, relatively long stroke and compact packaging, as well as high in efficiency. The actuator assembly comprises a frame, and at least one pair of spaced apart, laterally extending, conductor carrying, flexible beams attached to the frame. A non-magnetic armature, substantially U-shaped in cross section, is attached adjacent or approximate the extended terminal ends of the beams, and a probe is attached to the base of the "U" of the armature for contacting selected points in the electrical circuit associated with the device being tested. The heart of the actuator includes a coil mounted on the upstanding legs of the U-shaped armature and arranged so that the axis of the coil is perpendicular to the base of the armature but substantially parallel to the probe tip. This arrangement places the `motor` portion of the actuator adjacent the probe and permits accurate and repeatable, fast control of not only probe tip position but probe tip movement. To complete the motor portion of the actuator, means, carried by the frame create a magnetic field across the coil, whereby upon energization of the coil, deflection of the armature (and thus the beams) occurs, effecting movement of the probe tip into contact with selected portions of the device being tested.
公开/授权文献
- US5148025A In situ composition analysis during growth vapor deposition 公开/授权日:1992-09-15
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