发明授权
- 专利标题： Process for producing microstructure components on a substrate
- 专利标题（中）： 在基材上生产微结构组分的方法
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申请号： US401770申请日： 1995-03-10
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公开(公告)号： US5759616A公开(公告)日： 1998-06-02
- 发明人: Andreas Michel , Michael Harmening , Walter Bacher , Peter Bley , Robert Ruprecht , Alexander Both
- 申请人： Andreas Michel , Michael Harmening , Walter Bacher , Peter Bley , Robert Ruprecht , Alexander Both
- 申请人地址： DEX Karlsruhe
- 专利权人： Kernforschungszentrum Karlsruhe GmbH
- 当前专利权人： Kernforschungszentrum Karlsruhe GmbH
- 当前专利权人地址： DEX Karlsruhe
- 优先权： DEX4304424.7 19930213
- 主分类号： H01L21/3205
- IPC分类号： H01L21/3205 ; B81B7/02 ; G03F7/00 ; B05D5/12
摘要：
In a process for producing microstructure components on a substrate which carries electronic microcircuits cooperating functionally with the microstructure components, a first layer of a plastic material which connects with the substrate is applied to the substrate and a second layer of a plastic material which includes a separating agent but which firmly connects with the first layer is applied to the first layer and a molding tool is then impressed into the second layer to form the desired microstructures or to form cavities into the plastic material, which, upon removal of the molding tool, are filled with a metal to form the desired microstructures on the substrate upon removal of the plastic material.
公开/授权文献
- US4400430A Magnet wires 公开/授权日：1983-08-23
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