发明授权
- 专利标题： Bisphenol carboxylic acid tertiary ester derivatives and chemically amplified positive resist compositions
- 专利标题（中）： 双酚羧酸叔酯衍生物和化学放大正型抗蚀剂组合物
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申请号： US710298申请日： 1996-09-17
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公开(公告)号： US5856561A公开(公告)日： 1999-01-05
- 发明人: Takesi Nagata , Satoshi Watanabe , Katsuya Takemura , Tsunehiro Nishi , Shigehiro Nagura , Akinobu Tanaka , Yoshio Kawai
- 申请人： Takesi Nagata , Satoshi Watanabe , Katsuya Takemura , Tsunehiro Nishi , Shigehiro Nagura , Akinobu Tanaka , Yoshio Kawai
- 申请人地址： JPX Tokyo JPX Tokyo
- 专利权人： Shin-Etsu Chemical Co., Ltd.,Nippon Telegraph and Telephone Corp.
- 当前专利权人： Shin-Etsu Chemical Co., Ltd.,Nippon Telegraph and Telephone Corp.
- 当前专利权人地址： JPX Tokyo JPX Tokyo
- 优先权： JPX7-263457 19950918
- 主分类号： G03F7/004
- IPC分类号： G03F7/004 ; C07C69/734 ; C08F12/00 ; C08F12/22 ; C08K5/10 ; C08K5/107 ; C08L25/00 ; C08L25/08 ; C08L25/18 ; G03F7/039 ; H01L21/027 ; C07C69/76
摘要：
Novel bisphenol carboxylic acid tertiary ester derivatives having two aromatic ether groups and an ester group which are all replaced by acid labile groups are provided. The derivatives are used as a dissolution inhibitor in a chemically amplified positive resist composition comprising an organic solvent, an alkali soluble resin, and a photo-acid generator. Since the dissolution inhibitor has a highly reactive acetal group as an acid labile group, its coupling-off rapidly takes place after exposure. The dissolution inhibitor itself is less alkali soluble and its acid decomposition product is a phenol derivative having a carboxylic acid group with high alkali solubility, leading to a high dissolution contrast.
公开/授权文献
- USD340910S Electrical connector for temperature measuring equipment 公开/授权日：1993-11-02
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