公开(公告)号：US5856561A

公开(公告)日：1999-01-05

申请号：US710298

申请日：1996-09-17

申请人： Takesi Nagata ,  Satoshi Watanabe ,  Katsuya Takemura ,  Tsunehiro Nishi ,  Shigehiro Nagura ,  Akinobu Tanaka ,  Yoshio Kawai

发明人： Takesi Nagata ,  Satoshi Watanabe ,  Katsuya Takemura ,  Tsunehiro Nishi ,  Shigehiro Nagura ,  Akinobu Tanaka ,  Yoshio Kawai

IPC分类号： G03F7/004 ,  C07C69/734 ,  C08F12/00 ,  C08F12/22 ,  C08K5/10 ,  C08K5/107 ,  C08L25/00 ,  C08L25/08 ,  C08L25/18 ,  G03F7/039 ,  H01L21/027 ,  C07C69/76

CPC分类号： C07C69/734

摘要： Novel bisphenol carboxylic acid tertiary ester derivatives having two aromatic ether groups and an ester group which are all replaced by acid labile groups are provided. The derivatives are used as a dissolution inhibitor in a chemically amplified positive resist composition comprising an organic solvent, an alkali soluble resin, and a photo-acid generator. Since the dissolution inhibitor has a highly reactive acetal group as an acid labile group, its coupling-off rapidly takes place after exposure. The dissolution inhibitor itself is less alkali soluble and its acid decomposition product is a phenol derivative having a carboxylic acid group with high alkali solubility, leading to a high dissolution contrast.

摘要翻译： 提供了具有两个芳族醚基团和酯基的新的双酚羧酸叔酯衍生物，它们均被酸不稳定基团所取代。 该衍生物在包含有机溶剂，碱溶性树脂和光酸发生剂的化学放大型正性抗蚀剂组合物中用作溶解抑制剂。 由于溶解抑制剂具有作为酸不稳定基团的高反应性缩醛基团，因此其暴露后快速发生偶联。 溶解抑制剂本身的碱溶性较小，其酸分解产物是具有高碱溶性的羧酸基的苯酚衍生物，导致高的溶解对比度。