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US5888836A Process for the repair of floating-gate non-volatile memories damaged by plasma treatment 失效
用于修复等离子体处理损坏的浮栅非易失性存储器的过程

Process for the repair of floating-gate non-volatile memories damaged by
plasma treatment
摘要:
The process described requires the formation of floating-gate non-volatile memory cells entirely similar in structure to those produced by known processes. The process comprises an annealing treatment at relatively low temperature (430.degree. C.) to repair damage due to plasma treatments. To obtain threshold voltage values for the cells close to the theoretical values, especially for cells with particularly extended interconnections, the cells are subjected to ultraviolet radiation before the annealing treatment, in order to neutralize any electrical charges present in the floating-gate electrodes of the cells.
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