发明授权
US5888836A Process for the repair of floating-gate non-volatile memories damaged by
plasma treatment
失效
用于修复等离子体处理损坏的浮栅非易失性存储器的过程
- 专利标题: Process for the repair of floating-gate non-volatile memories damaged by plasma treatment
- 专利标题(中): 用于修复等离子体处理损坏的浮栅非易失性存储器的过程
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申请号: US990328申请日: 1997-12-15
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公开(公告)号: US5888836A公开(公告)日: 1999-03-30
- 发明人: Emilio Ghio , Simone Alba , Andrea Colognese
- 申请人: Emilio Ghio , Simone Alba , Andrea Colognese
- 申请人地址: ITX Agrate Brianza
- 专利权人: SGS-Thomson Microelectronics S.r.l.
- 当前专利权人: SGS-Thomson Microelectronics S.r.l.
- 当前专利权人地址: ITX Agrate Brianza
- 优先权: EPX96830624 19961216
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L21/336 ; H01L21/268
摘要:
The process described requires the formation of floating-gate non-volatile memory cells entirely similar in structure to those produced by known processes. The process comprises an annealing treatment at relatively low temperature (430.degree. C.) to repair damage due to plasma treatments. To obtain threshold voltage values for the cells close to the theoretical values, especially for cells with particularly extended interconnections, the cells are subjected to ultraviolet radiation before the annealing treatment, in order to neutralize any electrical charges present in the floating-gate electrodes of the cells.
公开/授权文献
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