发明授权
- 专利标题: Infrared detector and manufacturing process
- 专利标题(中): 红外探测器及制造工艺
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申请号: US905059申请日: 1997-08-01
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公开(公告)号: US5912464A公开(公告)日: 1999-06-15
- 发明人: Michel Vilain , Jean-Jacques Yon
- 申请人: Michel Vilain , Jean-Jacques Yon
- 申请人地址: FRX Paris
- 专利权人: Commissariat al'Energie Atomique
- 当前专利权人: Commissariat al'Energie Atomique
- 当前专利权人地址: FRX Paris
- 优先权: FRX9610005 19960808
- 主分类号: G01J1/02
- IPC分类号: G01J1/02 ; G01J5/02 ; G01J5/20 ; H01L27/146 ; H01L31/09 ; H01L37/00 ; H01C17/075
摘要:
An infrared detector includes a sensitive part having a sensitive element and conducting elements. The sensitive element includes a layer of material in which the resistivity varies with the temperature. The conducting elements perform the functions of electrodes for the detector and infrared absorber. At least one support element for the sensitive part is capable of positioning the sensitive part, electrically connecting the sensitive part to a readout circuit, and thermally insulating the sensitive part from the rest of the structure. All conducting elements are places on the same surface of the layer of temperature sensitive material. The detector is manufactured according to a forming and etching process.
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