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公开(公告)号：US5912464A
公开(公告)日：1999-06-15
申请号：US905059
申请日：1997-08-01
申请人： Michel Vilain , Jean-Jacques Yon
发明人： Michel Vilain , Jean-Jacques Yon
IPC分类号： G01J1/02 , G01J5/02 , G01J5/20 , H01L27/146 , H01L31/09 , H01L37/00 , H01C17/075
CPC分类号： G01J5/20 , H01L27/14669 , H01L31/09
摘要： An infrared detector includes a sensitive part having a sensitive element and conducting elements. The sensitive element includes a layer of material in which the resistivity varies with the temperature. The conducting elements perform the functions of electrodes for the detector and infrared absorber. At least one support element for the sensitive part is capable of positioning the sensitive part, electrically connecting the sensitive part to a readout circuit, and thermally insulating the sensitive part from the rest of the structure. All conducting elements are places on the same surface of the layer of temperature sensitive material. The detector is manufactured according to a forming and etching process.
摘要翻译： 红外检测器包括具有敏感元件和导电元件的敏感部件。 敏感元件包括电阻率随温度变化的材料层。 导电元件执行检测器和红外线吸收器的电极功能。 用于敏感部件的至少一个支撑元件能够定位敏感部件，将敏感部件电连接到读出电路，并将敏感部件与结构的其余部分热绝缘。 所有导电元件都是温度敏感材料层相同表面上的位置。 检测器根据成型和蚀刻工艺制造。
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2.发明授权Thermal electromagnetic radiation detector comprising an absorbent membrane fixed in suspension 失效热电磁辐射检测器，包括固定在悬浮液中的吸收膜公开(公告)号：US07294836B2
公开(公告)日：2007-11-13
申请号：US11206801
申请日：2005-08-19
申请人： Jean-Jacques Yon , Astrid Astier , Michel Vilain
发明人： Jean-Jacques Yon , Astrid Astier , Michel Vilain
摘要： The absorbent membrane of the detector is fixed in suspension by at least one thermally insulating support part onto a front face of a substrate comprising at least two electric connection terminals electrically connected to the membrane, for example by means of conducting layers. The support part has at least one base end and a raised zone. The base end is fixed to a top part of a conducting pillar having a base fixedly secured to one of the electric connection terminals. A substantially flat zone of a bottom face of the membrane is directly in contact with the raised zone of the support part. The support part is preferably formed by a bridge having a second base end fixed to a top part of a second pillar, the raised zone being formed by a flat middle part of the bridge.
摘要翻译： 检测器的吸收膜通过至少一个隔热支撑部件悬挂固定在基板的正面上，该基板包括至少两个电连接端子，电连接端子例如通过导电层电连接到膜。 支撑部分具有至少一个基端和凸起区域。 基端固定到导柱的顶部，导电柱具有牢固地固定到电连接端子之一的基座。 膜的底面的基本上平坦的区域直接与支撑部分的升高区域接触。 支撑部优选地由具有固定到第二柱的顶部的第二基端的桥构成，所述凸起区由桥的平坦的中间部形成。
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公开(公告)号：US07244935B2
公开(公告)日：2007-07-17
申请号：US10551425
申请日：2004-04-16
IPC分类号： G01J5/00
CPC分类号： G01J5/02 , B81B3/0081 , B81B2201/0278 , B81C2201/0115 , G01J5/0235 , G01J5/10 , H01L2924/0002 , H01L2924/00
摘要： An absorbent membrane (1) is fixed in suspension onto a front face of a substrate (2), in a direction substantially parallel to the substrate (2), by at least one alveolate structure thermally insulating the membrane from the substrate (2) and arranged in a plane substantially perpendicular to the substrate (2). The detector can comprise arms (3) fixedly secured to the absorbent membrane (1). The alveolate structures can be respectively arranged between one of the arms (3) and the substrate (2). The alveolate structure can be formed by a plurality of superposed thin layers (6) separated by spacers (7) or by superposed rows of arcades formed by thin layers. The alveolate structure can comprise a porous pad.
摘要翻译： 吸收膜（1）通过将膜与基板（2）热绝缘的至少一个肺泡结构以基本上平行于基底（2）的方向悬挂在基底（2）的正面上，以及 布置在基本上垂直于基底（2）的平面中。 检测器可以包括固定在吸收膜（1）上的臂（3）。 蜂窝结构可以分别布置在臂（3）中的一个和基底（2）之间。 蜂窝结构可以由多个由间隔物（7）分隔开的叠置的薄层（6）或由薄层形成的叠层的叠层形成。 泡沫结构可以包括多孔垫。
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公开(公告)号：US20060273256A1
公开(公告)日：2006-12-07
申请号：US10551425
申请日：2004-04-16
IPC分类号： G01J5/00
CPC分类号： G01J5/02 , B81B3/0081 , B81B2201/0278 , B81C2201/0115 , G01J5/0235 , G01J5/10 , H01L2924/0002 , H01L2924/00
摘要： An absorbent membrane (1) is fixed in suspension onto a front face of a substrate (2), in a direction substantially parallel to the substrate (2), by at least one alveolate structure thermally insulating the membrane from the substrate (2) and arranged in a plane substantially perpendicular to the substrate (2). The detector can comprise arms (3) fixedly secured to the absorbent membrane (1). The alveolate structures can be respectively arranged between one of the arms (3) and the substrate (2). The alveolate structure can be formed by a plurality of superposed thin layers (6) separated by spacers (7) or by superposed rows of arcades formed by thin layers. The alveolate structure can comprise a porous pad.
摘要翻译： 吸收膜（1）通过将膜与基板（2）热绝缘的至少一个肺泡结构以基本上平行于基底（2）的方向悬挂在基底（2）的正面上，以及 布置在基本上垂直于基底（2）的平面中。 检测器可以包括固定在吸收膜（1）上的臂（3）。 蜂窝结构可以分别布置在臂（3）中的一个和基底（2）之间。 蜂窝结构可以由多个由间隔物（7）分隔的叠置的薄层（6）或由薄层形成的叠层的叠层形成。 泡沫结构可以包括多孔垫。
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5.发明申请Thermal electromagnetic radiation detector comprising an absorbent membrane fixed in suspension 失效热电磁辐射检测器，包括固定在悬浮液中的吸收膜公开(公告)号：US20060054823A1
公开(公告)日：2006-03-16
申请号：US11206801
申请日：2005-08-19
申请人： Jean-Jacques Yon , Astrid Astier , Michel Vilain
发明人： Jean-Jacques Yon , Astrid Astier , Michel Vilain
IPC分类号： H01L27/14
摘要： The absorbent membrane of the detector is fixed in suspension by at least one thermally insulating support part onto a front face of a substrate comprising at least two electric connection terminals electrically connected to the membrane, for example by means of conducting layers. The support part has at least one base end and a raised zone. The base end is fixed to a top part of a conducting pillar having a base fixedly secured to one of the electric connection terminals. A substantially flat zone of a bottom face of the membrane is directly in contact with the raised zone of the support part. The support part is preferably formed by a bridge having a second base end fixed to a top part of a second pillar, the raised zone being formed by a flat middle part of the bridge.
摘要翻译： 检测器的吸收膜通过至少一个隔热支撑部件悬挂固定在基板的正面上，该基板包括至少两个电连接端子，电连接端子例如通过导电层电连接到膜。 支撑部分具有至少一个基端和凸起区域。 基端固定到导柱的顶部，导电柱具有牢固地固定到电连接端子之一的基座。 膜的底面的基本上平坦的区域直接与支撑部分的升高区域接触。 支撑部优选地由具有固定到第二柱的顶部的第二基端的桥构成，所述凸起区由桥的平坦的中间部形成。
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6.发明授权Bolometric detector with intermediate electrical insulation and manufacturing process for this detector 有权用于该检测器的中间电绝缘和制造工艺的测温探测器公开(公告)号：US06426539B1
公开(公告)日：2002-07-30
申请号：US09604916
申请日：2000-06-28
申请人： Michel Vilain , Jean-Jacques Yon
发明人： Michel Vilain , Jean-Jacques Yon
IPC分类号： H01L4300
CPC分类号： G01J5/20
摘要： Bolometric detector with intermediate electrical insulation and manufacturing process for this detector. According to the invention, at least two electrodes are formed facing the same face of a layer of bolometric material (5) and starting from the same layer of conducting material (8). Areas (8A, 8B) belonging to the two electrodes are electrically isolated from each other and electrically isolated from the layer of bolometric material, while other areas (7A, 7B) belonging to the two electrodes are separated from each other and are in electrical contact with this layer. The invention is particularly applicable to infrared imagery.
摘要翻译： 根据本发明，至少两个电极被形成为面向与一层的热辐射材料（5）相同的面，并且从相同的导电材料层（8）开始。 属于两个电极的区域（8A，8B）彼此电隔离并且与热应变材料层电隔离，而属于两个电极的其它区域（7A，7B）彼此分离并且电接触 与这层。 本发明特别适用于红外图像。
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公开(公告)号：US20140226021A1
公开(公告)日：2014-08-14
申请号：US14131298
申请日：2012-07-13
申请人： Charlie Koechlin , Patrick Bouchon , Riad Haidar , Jean-Luc Pelouard , Jean-Jacques Yon , Joël Deschamps , Fabrice Pardo , Stéphane Collin
发明人： Charlie Koechlin , Patrick Bouchon , Riad Haidar , Jean-Luc Pelouard , Jean-Jacques Yon , Joël Deschamps , Fabrice Pardo , Stéphane Collin
IPC分类号： G01J5/20 , H04N5/33 , H01L27/146
CPC分类号： G01J5/20 , G01J5/08 , G01J5/0853 , G01J2005/204 , H01L27/14685 , H04N5/33
摘要： According to one aspect, the invention relates to a microbolometer array for thermal detection of light radiation in a given spectral band, comprising a supporting substrate and an array of microbolometers (300) of given dimensions, arranged in an array. Each of said microbolometers comprises a membrane (301) suspended above said supporting substrate, said membrane consisting of an element (305) for absorbing the incident radiation and a thermometric element (304) in thermal contact with the absorber, electrically insulated from said absorber element. The absorber element comprises at least one first metal/insulator/metal (MIM) structure comprising a multilayer of three superposed films of submicron-order thickness i.e. a first metallic film (311), a dielectric film (310), and a second metallic film (309), said MIM structure being able to have a resonant absorption of said incident radiation at at least one wavelength in said spectral band. The area of the microbolometer pixel covered by said membrane (301) is less than or equal to half of the total area of the microbolometer pixel.
摘要翻译： 根据一个方面，本发明涉及一种用于在给定光谱带中的热辐射的热检测的微热辐射计阵列，其包括支撑衬底和以阵列布置的给定尺寸的微热计（300）阵列。 每个所述微伏热计包括悬挂在所述支撑基底上方的膜（301），所述膜由用于吸收入射辐射的元件（305）和与所述吸收体热接触的测温元件（304）组成，所述温度测量元件 。 所述吸收元件包括至少一个第一金属/绝缘体/金属（MIM）结构，其包括具有亚微米级厚度的三层重叠膜的多层，即第一金属膜（311），电介质膜（310）和第二金属膜 （309），所述MIM结构能够在所述光谱带中具有至少一个波长的所述入射辐射的共振吸收。 由所述膜（301）覆盖的微热辐射计像素的面积小于或等于微测热计像素的总面积的一半。
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公开(公告)号：US06316770B1
公开(公告)日：2001-11-13
申请号：US09340828
申请日：1999-06-28
IPC分类号： H01L2718
CPC分类号： G01J5/20
摘要： This detector has a resistive element (4) able to undergo heating which is provided with electrical biasing means (6, 8) for amplifying or increasing the heating, a thermometer (12) thermally coupled to the element and converting a temperature variation undergone by the thermometer into an electric signal, and a device (18) for reading the electric signal. The invented detector can be applied to measure and detect infrared radiation. The detector can also be applied to measure and detect radiation of different wavelengths.
摘要翻译： 该检测器具有能够进行加热的电阻元件（4），该电阻元件（4）设置有用于放大或增加加热的电偏置装置（6,8）;热耦合到该元件的温度计（12），并且将由 温度计变成电信号，以及用于读取电信号的装置（18）。 本发明的检测器可用于测量和检测红外辐射。 检测器也可以应用于测量和检测不同波长的辐射。
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公开(公告)号：US08816283B2
公开(公告)日：2014-08-26
申请号：US13881324
申请日：2011-10-25
CPC分类号： G01J5/10 , G01J5/02 , G01J5/0285 , G01J5/04 , G01J5/045 , G01J5/046 , G01J5/06 , G01J5/0853 , G01J5/20 , G01J2005/068
摘要： The electromagnetic radiation detection device includes, on a same substrate: at least one active detector of the electromagnetic radiation provided with a first element sensitive to said radiation, at least one reference detector including a second element sensitive to said electromagnetic radiation, and a lid provided with first reflective means reflecting the incident electromagnetic radiation, said lid covering without contact the second sensitive element and defining with the substrate a cavity having the reference detector housed therein. The lid is designed to improve the sensitivity of the detection device.
摘要翻译： 所述电磁辐射检测装置包括在同一衬底上：至少一个电磁辐射的有源检测器，其具有对所述辐射敏感的第一元件，至少一个参考检测器，包括对所述电磁辐射敏感的第二元件，以及盖 具有反射入射的电磁辐射的第一反射装置，所述盖子覆盖物不与第二敏感元件接触并且与衬底一起限定容纳有参考探测器的空腔。 盖子设计用于提高检测装置的灵敏度。
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公开(公告)号：US20130240738A1
公开(公告)日：2013-09-19
申请号：US13881324
申请日：2011-10-25
IPC分类号： G01J5/10
CPC分类号： G01J5/10 , G01J5/02 , G01J5/0285 , G01J5/04 , G01J5/045 , G01J5/046 , G01J5/06 , G01J5/0853 , G01J5/20 , G01J2005/068
摘要： The electromagnetic radiation detection device includes, on a same substrate: at least one active detector of the electromagnetic radiation provided with a first element sensitive to said radiation, at least one reference detector including a second element sensitive to said electromagnetic radiation, and a lid provided with first reflective means reflecting the incident electromagnetic radiation, said lid covering without contact the second sensitive element and defining with the substrate a cavity having the reference detector housed therein. The lid is designed to improve the sensitivity of the detection device.
摘要翻译： 所述电磁辐射检测装置包括在同一衬底上：至少一个电磁辐射的有源检测器，其具有对所述辐射敏感的第一元件，至少一个参考检测器，包括对所述电磁辐射敏感的第二元件，以及盖 具有反射入射的电磁辐射的第一反射装置，所述盖子覆盖物不与第二敏感元件接触并且与衬底一起限定容纳有参考探测器的空腔。 盖子设计用于提高检测装置的灵敏度。
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