发明授权
- 专利标题: Providing dual work function doping
- 专利标题(中): 提供双重功能掺杂
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申请号: US3106申请日: 1998-01-06
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公开(公告)号: US5937289A公开(公告)日: 1999-08-10
- 发明人: Gary Bela Bronner , Jeffrey P. Gambino , Jack A. Mandelman , Carl J. Radens , William Robert Tonti
- 申请人: Gary Bela Bronner , Jeffrey P. Gambino , Jack A. Mandelman , Carl J. Radens , William Robert Tonti
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: H01L21/225
- IPC分类号: H01L21/225 ; H01L21/28 ; H01L21/8234 ; H01L21/8242 ; H01L27/088 ; H01L27/108 ; H01L21/8238
摘要:
Dual work function doping is provided by doping a selected number of gate structures having self-aligned insulating layer on top of the structures through at least one side wall of the gate structures with a first conductivity type to thereby provide an array of gate structures whereby some are doped with the first conductivity type and others of the gate structures are doped with a second and different conductivity type. Also provided is an array of gate structures whereby the individual gate structures contain self-aligned insulating layer on their top portion and wherein some of the gate structures are doped with a first conductivity type and other of the gate structures are doped with a second and different conductivity type.
公开/授权文献
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