发明授权
- 专利标题: High-throughput direct-write electron-beam exposure system and method
- 专利标题(中): 高通量直写电子束曝光系统及方法
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申请号: US30653申请日: 1998-02-05
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公开(公告)号: US5969362A公开(公告)日: 1999-10-19
- 发明人: Shintaro Kawata , Kazuya Okamoto
- 申请人: Shintaro Kawata , Kazuya Okamoto
- 申请人地址: JPX Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX9-055403 19970225
- 主分类号: H01J37/073
- IPC分类号: H01J37/073 ; H01J37/305 ; H01J37/317 ; H01J37/30 ; H01J37/14
摘要:
An electron-beam exposure system includes: (1) a stage for supporting a wafer, (2) a planar electron-beam source that emits multiple electron beamlets toward the stage, (3) an electric-field generator for forming an electric field to accelerate the electrons in the electron beamlets, (4) a magnetic-field generator for forming a magnetic flux in the space between the planar electron-beam source and the wafer stage. The magnetic filed generator is structured and arranged such that the magnetic flux formed thereby is (1) substantially evenly distributed within a plane perpendicular to the optical axis, and (2) of increasing flux density, ranging from a first density in the vicinity of the planar electron-beam source, to a second density (greater than the first density) in the vicinity of the wafer stage. The electrons in the electron beamlets follow the lines of magnetic flux such that the beamlet width is decreased at the stage compared to the beamlet width at the planar electron-beam source. The electron beamlets are preferably individually switchable, on and off, by word lines and bit lines on the planar electron-beam source. To form a desired pattern on a wafer surface, the stage is moved through a small area, while the electron beamlets are modulated as needed to write the desired pattern.