公开(公告)号：US5969362A

公开(公告)日：1999-10-19

申请号：US30653

申请日：1998-02-05

申请人： Shintaro Kawata ,  Kazuya Okamoto

发明人： Shintaro Kawata ,  Kazuya Okamoto

IPC分类号： H01J37/073 ,  H01J37/305 ,  H01J37/317 ,  H01J37/30 ,  H01J37/14

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3177

摘要： An electron-beam exposure system includes: (1) a stage for supporting a wafer, (2) a planar electron-beam source that emits multiple electron beamlets toward the stage, (3) an electric-field generator for forming an electric field to accelerate the electrons in the electron beamlets, (4) a magnetic-field generator for forming a magnetic flux in the space between the planar electron-beam source and the wafer stage. The magnetic filed generator is structured and arranged such that the magnetic flux formed thereby is (1) substantially evenly distributed within a plane perpendicular to the optical axis, and (2) of increasing flux density, ranging from a first density in the vicinity of the planar electron-beam source, to a second density (greater than the first density) in the vicinity of the wafer stage. The electrons in the electron beamlets follow the lines of magnetic flux such that the beamlet width is decreased at the stage compared to the beamlet width at the planar electron-beam source. The electron beamlets are preferably individually switchable, on and off, by word lines and bit lines on the planar electron-beam source. To form a desired pattern on a wafer surface, the stage is moved through a small area, while the electron beamlets are modulated as needed to write the desired pattern.

摘要翻译： 电子束曝光系统包括：（1）用于支撑晶片的台，（2）朝向平台发射多个电子束的平面电子束源，（3）用于形成电场的电场发生器 加速电子束中的电子，（4）用于在平面电子束源和晶片台之间的空间中形成磁通量的磁场发生器。 磁场发生器的结构和布置使得由此形成的磁通量是（1）在垂直于光轴的平面内基本上均匀分布，以及（2）增加磁通密度，范围从第 平面电子束源在晶片台附近达到第二密度（大于第一密度）。 电子束中的电子遵循磁通线，使得在与平面电子束源处的子束宽度相比较的阶段，子束宽度减小。 电子子束优选地可以通过平面电子束源上的字线和位线单独地切换，打开和关闭。 为了在晶片表面上形成期望的图案，将载物台移动通过小的区域，同时根据需要对电子束进行调制以写入期望的图案。

公开(公告)号：US09545218B2

公开(公告)日：2017-01-17

申请号：US13403315

申请日：2012-02-23

申请人： Miyuki Ota ,  Sadanori Tomiha ,  Shinji Mitsui ,  Mitsuo Takagi ,  Hiroki Motohashi ,  Kazuya Okamoto ,  Junichi Makita

发明人： Miyuki Ota ,  Sadanori Tomiha ,  Shinji Mitsui ,  Mitsuo Takagi ,  Hiroki Motohashi ,  Kazuya Okamoto ,  Junichi Makita

IPC分类号： G01R33/44 ,  A61B5/055 ,  G01R33/34

CPC分类号： A61B5/0555 ,  G01R33/34084

摘要： In one embodiment, an RF coil device includes a base board, a belt member, a first coil element, a second coil element inside the base board, and a connecting unit. Both ends of the belt member are respectively connected to mutually separated places on the base board, so that the center part of the belt member is located on the anterior surface of the base board. The belt member is curved to form airspace between the center part thereof and the anterior surface for letting an arm pass through in interdigitation state. The first coil element includes first and second partial coils inside the belt member, and becomes a loop coil element by their connection. The connecting unit detachably connects the base board to the belt member, and mutually connects the first and second partial coils in the interdigitation state.

摘要翻译： 在一个实施例中，RF线圈装置包括基板，带部件，第一线圈元件，基板内部的第二线圈元件和连接单元。 带构件的两端分别连接到基板上相互分开的位置，使得带构件的中心部分位于基板的前表面上。 带构件弯曲以在其中心部分和前表面之间形成空腔，以使臂在交叉状态下通过。 第一线圈元件包括带部件内的第一和第二部分线圈，并且通过它们的连接成为环形线圈元件。 连接单元将基板可拆卸地连接到带构件，并且以交叉状态相互连接第一和第二部分线圈。

公开(公告)号：US08643362B2

公开(公告)日：2014-02-04

申请号：US13048314

申请日：2011-03-15

申请人： Takahiro Sekiguchi ,  Koji Akita ,  Toshiyuki Nakanishi ,  Kazuya Okamoto ,  Sojuro Kato

发明人： Takahiro Sekiguchi ,  Koji Akita ,  Toshiyuki Nakanishi ,  Kazuya Okamoto ,  Sojuro Kato

IPC分类号： G01R33/44

CPC分类号： G01R33/3692 ,  G01R33/3607

摘要： According to one embodiment, a apparatus includes a coil, a clock generator, an echo transmitter, a carrier generator, a clock transmitter, a regenerator, an receiver, a reconstructor, a detector, and a controller. The echo transmitter generates and transmits an echo transmission signal synchronously with a clock signal generated by the clock generator to wirelessly transmit an echo signal output from the col. The carrier generator generates a carrier signal have a frequency within a variable range. The clock transmitter wirelessly transmits a clock transmission signal. The regenerator regenerates the clock signal based on the transmitted clock transmission signal. The receiver extracts the echo signal synchronously with the regenerated clock signal from the transmitted echo transmission signal. The detector detects a frequency of an interference wave. The controller controls the carrier generator to generate the carrier signal having a frequency which comparatively small interference with respect to the detected frequency.

摘要翻译： 根据一个实施例，一种装置包括线圈，时钟发生器，回波发射器，载波发生器，时钟发射器，再生器，接收器，重建器，检测器和控制器。 回波发射机与由时钟发生器产生的时钟信号同步地生成和发送回波发送信号，以无线地发送从该列输出的回波信号。 载波发生器产生具有可变范围内的频率的载波信号。 时钟发射机无线传输时钟传输信号。 再生器基于发送的时钟传输信号再生时钟信号。 接收机从发送的回波发送信号中与再生的时钟信号同步地提取回波信号。 检测器检测到干扰波的频率。 控制器控制载波发生器以产生具有相对于检测到的频率具有相对小的干扰的频率的载波信号。

公开(公告)号：US08299848B2

公开(公告)日：2012-10-30

申请号：US12694008

申请日：2010-01-26

申请人： Isao Sugaya ,  Kazuya Okamoto

发明人： Isao Sugaya ,  Kazuya Okamoto

IPC分类号： H01L25/00

CPC分类号： H01L23/34 ,  H01L21/563 ,  H01L23/3128 ,  H01L23/36 ,  H01L23/473 ,  H01L25/0657 ,  H01L2224/0554 ,  H01L2224/05573 ,  H01L2224/05611 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/13025 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00014 ,  H01L2924/15311 ,  H01L2924/15321 ,  H01L2224/05599 ,  H01L2224/0555 ,  H01L2224/0556

摘要： Provided is a multi-layered semiconductor apparatus with improved heat diffusion and improved heat release. The multi-layered semiconductor apparatus (100) includes a plurality of layered semiconductor chips (20-1, 20-2) that each include at least one circuit region, and the circuit regions are arranged such that heat generated by the circuit regions as a result of the circuit regions being driven is spread out. The multi-layered semiconductor apparatus (100) further comprises a heat releasing section (50) that releases the heat generated by the circuit regions, and the circuit regions are arranged such that there is less thermal resistance between the heat releasing section and circuit regions that generate a greater amount of heat per unit area.

摘要翻译： 提供了一种具有改进的热扩散和改进的放热的多层半导体装置。 多层半导体装置（100）包括多个分层半导体芯片（20-1,20-2），每个半导体芯片包括至少一个电路区域，并且电路区域被布置成使得由电路区域产生的热量作为 驱动电路区域的结果展开。 所述多层半导体装置（100）还包括释放由所述电路区域产生的热的放热部（50），所述电路区域配置成使得所述散热部与所述电路区之间的热阻较小， 每单位面积产生更大的热量。

公开(公告)号：US08232802B2

公开(公告)日：2012-07-31

申请号：US12662825

申请日：2010-05-05

申请人： Kazuya Okamoto ,  Shinji Mitsui ,  Manabu Ishii

发明人： Kazuya Okamoto ,  Shinji Mitsui ,  Manabu Ishii

IPC分类号： G01V3/00

CPC分类号： G01R33/3415

摘要： A radio frequency coil assembly is provided that includes a first radio frequency coil for receiving a magnetic resonance signal from a tested body; a second radio frequency coil for receiving a magnetic resonance signal from the tested body; and a third radio frequency coil for receiving a magnetic resonance signal from the tested body and having a shape that is different from that of at least one of the first and second radio frequency coils so as to increase local sensitivity in an image-picked-up region.

摘要翻译： 提供了一种射频线圈组件，其包括用于从测试体接收磁共振信号的第一射频线圈; 第二射频线圈，用于从所测试的身体接收磁共振信号; 以及第三射频线圈，用于从所测试的身体接收磁共振信号，并具有不同于第一和第二射频线圈中的至少一个的形状，以增加拍摄的图像中的局部灵敏度 地区。

公开(公告)号：US08129201B2

公开(公告)日：2012-03-06

申请号：US12230095

申请日：2008-08-22

申请人： Kazuya Okamoto

发明人： Kazuya Okamoto

IPC分类号： H01L21/00

CPC分类号： H01L21/68 ,  H01L21/67253 ,  H01L21/67259 ,  H01L25/0657 ,  H01L25/50 ,  H01L2924/0002 ,  Y10S438/975 ,  H01L2924/00

摘要： A stacking apparatus that stacks chip assemblies each having a plurality of chips disposed continuously with circuit patterns and electrodes, includes: a plurality of stages each allowed to move arbitrarily, on which the chip assemblies are placed; a storage unit that stores an estimated extent of change in a position of an electrode at each chip, expected to occur as heat is applied to the chip assemblies placed on the plurality of stages during a stacking process; and a control unit that sets positions of the plurality of stages to be assumed relative to each other during the stacking process based upon the estimated extent of change in the position of the electrode at each chip provided from the storage unit and position information indicating positions of individual chips formed at the chip assemblies and controls at least one of the plurality of stages.

摘要翻译： 堆叠装置，其堆叠各自具有与电路图案和电极连续布置的多个芯片的芯片组件，包括：允许任意移动的多个级，其上放置芯片组件; 存储单元，其存储在堆叠处理期间当放置在所述多个级上的所述芯片组件施加热量时期望发生的每个芯片处的电极的位置的估计变化范围; 以及控制单元，其基于从所述存储单元提供的每个芯片处的所述电极的所述位置的估计的变化范围和所述位置信息，所述控制单元在所述堆叠处理期间设定要相对于彼此假设的所述多个级的位置， 在芯片组件处形成的单个芯片并且控制多个级中的至少一个级。

公开(公告)号：US08061379B2

公开(公告)日：2011-11-22

申请号：US12392210

申请日：2009-02-25

申请人： Jouji Inaba ,  Kazuya Okamoto

发明人： Jouji Inaba ,  Kazuya Okamoto

IPC分类号： F15B13/00

CPC分类号： F16K27/003 ,  F15B13/0839 ,  F16K31/426 ,  Y10T137/5283 ,  Y10T137/86614 ,  Y10T137/87885

摘要： A plurality of valve assemblies are provided to a base, and an air-supply flow path for supplying compressed air to each valve assembly is formed in the base. A main flow path communicating with the air-supply flow path and communicating with a pilot air-supply flow path is formed in an air supply block. When the compressed air is supplied to the air-supply flow path and the pilot air-supply flow path from the main flow path, a manifold solenoid valve becomes an internal pilot type. An external pilot flow path communicating with the pilot air-supply flow path is formed in an external pilot block, and when the external pilot block is provided, communication between the main flow path and the pilot air-supply flow path is shut off, and the manifold solenoid valve becomes an external pilot type in which the pilot pressure is supplied from the external pilot flow path.

摘要翻译： 多个阀组件设置在底座上，在基座上形成用于向每个阀组件供给压缩空气的供气流路。 在空气供应块中形成有与供气流路连通并与先导供气流路连通的主流路。 当压缩空气从主流路向供气流路和先导供气流路供给时，歧管电磁阀成为内部先导式。 在外部先导块中形成有与先导供气流路连通的外部先导流路，当设置外部先导块时，主流路与先导供气流路之间的连通被切断， 歧管电磁阀成为从外部先导流路供给先导压力的外部先导式。

公开(公告)号：US20100201432A1

公开(公告)日：2010-08-12

申请号：US12694008

申请日：2010-01-26

申请人： Isao Sugaya ,  Kazuya Okamoto

发明人： Isao Sugaya ,  Kazuya Okamoto

IPC分类号： G05F1/10 ,  H01L23/34

CPC分类号： H01L23/34 ,  H01L21/563 ,  H01L23/3128 ,  H01L23/36 ,  H01L23/473 ,  H01L25/0657 ,  H01L2224/0554 ,  H01L2224/05573 ,  H01L2224/05611 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/13025 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00014 ,  H01L2924/15311 ,  H01L2924/15321 ,  H01L2224/05599 ,  H01L2224/0555 ,  H01L2224/0556

摘要： Provided is a multi-layered semiconductor apparatus with improved heat diffusion and improved heat release. The multi-layered semiconductor apparatus (100) includes a plurality of layered semiconductor chips (20-1, 20-2) that each include at least one circuit region, and the circuit regions are arranged such that heat generated by the circuit regions as a result of the circuit regions being driven is spread out. The multi-layered semiconductor apparatus (100) further comprises a heat releasing section (50) that releases the heat generated by the circuit regions, and the circuit regions are arranged such that there is less thermal resistance between the heat releasing section and circuit regions that generate a greater amount of heat per unit area.

摘要翻译： 提供了一种具有改进的热扩散和改进的放热的多层半导体装置。 多层半导体装置（100）包括多个分层半导体芯片（20-1,20-2），每个半导体芯片包括至少一个电路区域，并且电路区域被布置成使得由电路区域产生的热量作为 驱动电路区域的结果展开。 所述多层半导体装置（100）还包括释放由所述电路区域产生的热量的散热部（50），所述电路区域配置成使得所述散热部与所述电路区域之间的热阻较小， 每单位面积产生更大的热量。

公开(公告)号：US07446529B2

公开(公告)日：2008-11-04

申请号：US11490245

申请日：2006-07-21

申请人： Kazuya Okamoto

发明人： Kazuya Okamoto

IPC分类号： G01V3/00

CPC分类号： G01R33/3415

摘要： A radio frequency coil unit includes a plurality of surface coils and a distributing/combining unit. The plurality of surface coils are arranged in a body-axis direction. The distributing/combining unit distributes and combines reception signals output from the plurality of surface coils to generate a new reception signal.

摘要翻译： 射频线圈单元包括多个表面线圈和分配/组合单元。 多个表面线圈沿主体轴方向排列。 分配/组合单元分配并组合从多个表面线圈输出的接收信号，以产生新的接收信号。

公开(公告)号：US07227361B2

公开(公告)日：2007-06-05

申请号：US11392870

申请日：2006-03-30

申请人： Kazuya Okamoto ,  Yoshinori Hamamura ,  Yoshio Machida

发明人： Kazuya Okamoto ,  Yoshinori Hamamura ,  Yoshio Machida

IPC分类号： G01V3/00 ,  A61B5/055

CPC分类号： G01R33/3415 ,  G01R33/3678

摘要： A magnetic resonance imaging apparatus acquires magnetic resonance signals by the PI method using an RF coil unit having basic coils serving as surface coils which are arrayed with at least two coils along a static magnetic field direction (Z direction) and and at least two coils along each of two orthogonal x, y directions. The coils are divided into an upper unit and a lower unit. The upper unit and lower unit are fixed by a band or the like to allow them to be mounted on an object to be examined. The signals detected by the respective surface coils are sent to a data processing system through independent receiver unit and formed into a magnetic resonance image.

摘要翻译： 磁共振成像装置使用具有作为表面线圈的基本线圈的RF线圈单元通过PI法获取磁共振信号，该线圈单元沿着静磁场方向（Z方向）排列有至少两个线圈，并且至少两个线圈沿着 两个正交的x，y方向中的每一个。 线圈分为上部单元和下部单元。 上部单元和下部单元通过带状物等固定，以便将它们安装在被检查物体上。 由各个表面线圈检测的信号通过独立的接收器单元发送到数据处理系统并形成磁共振图像。