发明授权
- 专利标题: Scanning probe potentiometer
- 专利标题(中): 扫描探头电位器
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申请号: US47887申请日: 1998-03-25
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公开(公告)号: US6002131A公开(公告)日: 1999-12-14
- 发明人: Scott R. Manalis , Stephen C. Minne , Calvin F. Quate
- 申请人: Scott R. Manalis , Stephen C. Minne , Calvin F. Quate
- 申请人地址: CA Palo Alto
- 专利权人: The Board of Trustees of the Leland Stanford Junior University
- 当前专利权人: The Board of Trustees of the Leland Stanford Junior University
- 当前专利权人地址: CA Palo Alto
- 主分类号: C25F3/00
- IPC分类号: C25F3/00 ; G01N27/24 ; G01Q10/00 ; G01Q30/14 ; G01Q70/16 ; G01R31/308 ; G01R29/12
摘要:
A system for scanning and measuring a surface charge of a sample immersed in a conductive medium, such as an aqueous electrolytic solution or a gel, or positioned on a conducting plate. The system has a semiconductor with a probing surface clad in a charge-sensitive layer. The probing surface moves over the sample during scanning while a bias voltage V.sub.BIAS is applied to create a depletion layer in the semiconductor and to induce the system to alter a measurable electrical property. The electrical property is monitored with the aid of a measuring device and the measurement is correlated to the sample's surface charge. In a preferred embodiment the semiconductor is a part of a cantilever structure of the type having a probing tip and the probing surface is located on the apex of the probing tip thereby enabling examination of the topology and surface charge of the sample concurrently.
公开/授权文献
- US4907038A Langmuir Blodgett ultrathin membrane of polyfumarate 公开/授权日:1990-03-06
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