发明授权
- 专利标题: Electronically controlled vacuum pump with control module
- 专利标题(中): 电控真空泵带控制模块
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申请号: US517091申请日: 1995-08-21
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公开(公告)号: US06022195A公开(公告)日: 2000-02-08
- 发明人: Peter W. Gaudet , Michael J. Eacobacci , Robert J. Lepofsky , David E. Roche , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
- 申请人: Peter W. Gaudet , Michael J. Eacobacci , Robert J. Lepofsky , David E. Roche , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
- 申请人地址: MA Mansfield
- 专利权人: Helix Technology Corporation
- 当前专利权人: Helix Technology Corporation
- 当前专利权人地址: MA Mansfield
- 主分类号: F04B37/08
- IPC分类号: F04B37/08 ; F04B49/06 ; F04D19/04 ; F04D27/00 ; F04B49/00
摘要:
A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
公开/授权文献
- US5175227A Acid etch resistant coatings containing polyurethane polyols 公开/授权日:1992-12-29