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公开(公告)号：US06902378B2
公开(公告)日：2005-06-07
申请号：US10095126
申请日：2002-03-08
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US06022195A
公开(公告)日：2000-02-08
申请号：US517091
申请日：1995-08-21
申请人： Peter W. Gaudet , Michael J. Eacobacci , Robert J. Lepofsky , David E. Roche , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Michael J. Eacobacci , Robert J. Lepofsky , David E. Roche , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US20080267790A1
公开(公告)日：2008-10-30
申请号：US12170802
申请日：2008-07-10
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
IPC分类号： F04B23/08
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US06461113B1
公开(公告)日：2002-10-08
申请号：US09454358
申请日：1999-12-03
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
IPC分类号： F04B4900
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US5443368A
公开(公告)日：1995-08-22
申请号：US92692
申请日：1993-07-16
申请人： Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte' , Peter W. Gaudet , Martin Stein , Steven C. Rosner , Robert J. Lepofsky
发明人： Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte' , Peter W. Gaudet , Martin Stein , Steven C. Rosner , Robert J. Lepofsky
摘要： A vacuum system comprises, as an integral assembly, a turbomolecular pump with drive motor, a vent valve, a purge valve, a roughing valve, a heater and an electronic control module. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. Proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动马达的涡轮分子泵，排气阀，净化阀，粗加工阀，加热器和电子控制模块。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 通过检测泵驱动器上的当前负载或通过检测前级压力来检测净化气体通过清洗阀的正确引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US07413411B2
公开(公告)日：2008-08-19
申请号：US11115774
申请日：2005-04-27
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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