A semiconductor process in which a silicon film is chemically vapor deposited upon a native oxide film as part of the gate oxide formation process. The invention contemplates a method of forming a thin gate dielectric semiconductor transistor. A semiconductor substrate which includes a native oxide film on an upper region of a silicon bulk is provided and a silicon film is deposited on the native oxide film. A first oxide film is then formed on a the native oxide film by thermally oxidizing a portion of the silicon film proximal to the native oxide film such that the thin gate dielectric comprises the native oxide film and the first oxide film. Thereafter, a conductive gate is formed on the thin gate dielectric and a pair of source/drain structures are formed within a pair of source/drain regions of the semiconductor substrate. The pair of source/drain structures are laterally displaced on either side of the channel region of the semiconductor substrate. In one embodiment the process further includes the step, prior to the formation of the first oxide layer, of thinning the silicon layer by removing an upper portion of the silicon layer. In one embodiment, a barrier dielectric is deposited on an upper surface of the silicon film prior to the step of forming the first oxide film. In still another embodiment, the process further includes the step of depositing a barrier dielectric after the formation of the first oxide film and prior to the formation of the conductive gate.