发明授权
US6054335A Fabrication of scanning III-V compound light emitters integrated with
Si-based actuators
有权
与Si基致动器集成的扫描III-V复合发光体的制造
- 专利标题： Fabrication of scanning III-V compound light emitters integrated with Si-based actuators
- 专利标题（中）： 与Si基致动器集成的扫描III-V复合发光体的制造
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申请号： US209866申请日： 1998-12-11
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公开(公告)号： US6054335A公开(公告)日： 2000-04-25
- 发明人: Decai Sun , Ross D. Bringans , Christopher L. Chua , Philip D. Floyd , Eric Peeters , Joel A. Kubby , Alex T. Tran
- 申请人： Decai Sun , Ross D. Bringans , Christopher L. Chua , Philip D. Floyd , Eric Peeters , Joel A. Kubby , Alex T. Tran
- 申请人地址： CT Stamford
- 专利权人： Xerox Corporation
- 当前专利权人： Xerox Corporation
- 当前专利权人地址： CT Stamford
- 主分类号： B81B3/00
- IPC分类号： B81B3/00 ; B81B7/02 ; H01L27/15 ; H01S5/00 ; H01S5/02 ; H01S5/022 ; H01S5/026 ; H01S5/042 ; H01S5/183 ; H01S5/42 ; H01L21/00
摘要：
A III-V compound light emitter is integrated with Si-based actuators. The Proposed devices take advantage of the superior optical properties of III-V compounds and the superior mechanical properties of Si, as well as mature fabrication technologies of Si-Micro-Electro-Mechanical Systems (MEMS). The emitter can be a light emitting diode (LED), a vertical cavity surface emitting laser (VCSEL) or an edge emitting laser. Electro or magnetic based actuation from Si-based actuators provides linear or angular movement of the light emitter.
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