发明授权
- 专利标题: Scrubbing apparatus and scrubbing method
- 专利标题(中): 擦洗装置和洗涤方法
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申请号: US25344申请日: 1998-02-18
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公开(公告)号: US6058544A公开(公告)日: 2000-05-09
- 发明人: Kimio Motoda , Yoshiharu Ota , Norio Uchihira , Kiyohisa Tateyama
- 申请人: Kimio Motoda , Yoshiharu Ota , Norio Uchihira , Kiyohisa Tateyama
- 申请人地址: JPX
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JPX
- 优先权: JPX9-035104 19970219
- 主分类号: G02F1/13
- IPC分类号: G02F1/13 ; B08B1/00 ; B08B1/04 ; B08B3/04 ; B08B11/02 ; G11B23/50 ; H01L21/00 ; H01L21/304 ; B08B3/10
摘要:
A scrubbing apparatus comprises a holding member, which holds the outer circumference of the substrate from its back surface and has an opening to expose the back surface of the held substrate toward the bottom side; a supporting member, which supports substantially the center between two opposed sides of the holding member; a scrubbing brush, which comes in contact with the exposed back surface of the substrate from the bottom side; a brush drive mechanism, which transfers the scrubbing brush along the two opposed sides of the holding member; and a rotation drive mechanism, which drives to rotate the holding member together with the supporting member. Thus, a space can be saved, and the back surface of the substrate can be scrubbed.
公开/授权文献
- USD367995S Streamlined gas range 公开/授权日:1996-03-19
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