发明授权
US6060742A ETOX cell having bipolar electron injection for substrate-hot-electron
program
有权
具有用于基板热电子程序的双极电子注入的ETOX单元
- 专利标题: ETOX cell having bipolar electron injection for substrate-hot-electron program
- 专利标题(中): 具有用于基板热电子程序的双极电子注入的ETOX单元
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申请号: US334080申请日: 1999-06-16
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公开(公告)号: US6060742A公开(公告)日: 2000-05-09
- 发明人: Min-hwa Chi , Min-Chie Jung
- 申请人: Min-hwa Chi , Min-Chie Jung
- 申请人地址: TWX Hsinchu
- 专利权人: Worldwide Semiconductor Manufacturing Corporation
- 当前专利权人: Worldwide Semiconductor Manufacturing Corporation
- 当前专利权人地址: TWX Hsinchu
- 主分类号: H01L29/788
- IPC分类号: H01L29/788 ; H01L29/76 ; G11C14/00
摘要:
An ETOX cell that has improved injection of electrons from a forward biased deep n-well to p-well junction underneath the channel area of a triple-well ETOX cell during substrate hot electron (SHE) programming. The ETOX cell has a control gate, a floating gate, a deep n-well formed in the substrate, a buried n+ layer in the deep n-well, a p-well formed in the n-well and atop the buried n+ layer, a drain implant formed in the p-well, and a source implant formed in the p-well. The buried n+ layer enhances the parasitic bipolar action between the n+ source/drain (as collector), the p-well (as base), and the buried n+ layer (as emitter). The parasitic transistor amplifies the amount of seed electrons injected into the p-well, which in turn results in significantly faster programming of the ETOX cell.
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