Invention Grant
- Patent Title: Field effect transistor
- Patent Title (中): 场效应晶体管
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Application No.: US126844Application Date: 1998-07-31
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Publication No.: US06075270APublication Date: 2000-06-13
- Inventor: Masao Okihara , Hidetsugu Uchida
- Applicant: Masao Okihara , Hidetsugu Uchida
- Applicant Address: JPX Tokyo
- Assignee: Oki Electric Industry Co., Ltd.
- Current Assignee: Oki Electric Industry Co., Ltd.
- Current Assignee Address: JPX Tokyo
- Priority: JPX9-229533 19970826
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L21/336 ; H01L29/78 ; H01L29/04
Abstract:
A field effect transistor and a method for forming the field effect transistor are made up of a source region which is formed on the substrate, a drain region which is formed on the substrate, a stepped portion which is formed in the substrate between the source region and the drain region, a gate insulating film which is formed on the stepped portion of the substrate, and a gate electrode which is formed on the gate insulating film, wherein, a thickness of the gate insulating film near the drain region, which is less than that of the gate insulating film on a channel region defined in the substrate between the source region and the drain region. Accordingly, the field effect transistor and a method for forming the field effect transistor can prevent degradation of transistor characteristics because of a hot carrier effect.
Public/Granted literature
- US5353835A Air tank drain Public/Granted day:1994-10-11
Information query
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