发明授权
- 专利标题: Acceleration sensor with ring-shaped movable electrode
- 专利标题(中): 带环形可动电极的加速度传感器
-
申请号: US09241137申请日: 1999-02-02
-
公开(公告)号: US06199430B1公开(公告)日: 2001-03-13
- 发明人: Kazuhiko Kano , Koji Hattori , Yoshinori Ohtsuka , Makiko Sugiura , Minekazu Sakai , Inao Toyoda , Yasutoshi Suzuki , Seiichiro Ishio , Minoru Murata
- 申请人: Kazuhiko Kano , Koji Hattori , Yoshinori Ohtsuka , Makiko Sugiura , Minekazu Sakai , Inao Toyoda , Yasutoshi Suzuki , Seiichiro Ishio , Minoru Murata
- 优先权: JP9-160292 19970617; JP9-177404 19970702; JP9-349439 19971218; JP10-021345 19980202; JP10-051028 19980303
- 主分类号: G01P15125
- IPC分类号: G01P15125
摘要:
An acceleration sensor has a ring-shaped movable electrode connected to an anchor part via beams and a fixed electrode facing the ring-shaped movable electrode defining a specific interval, which are disposed on a substrate. The movable electrode is displaced by acceleration approximately in parallel to the substrate and contacts the fixed electrode, so that the acceleration is detected. The fixed electrode is divided into a detecting fixed electrode for contacting the movable electrode and a sensitivity controlling fixed electrode insulated from the detecting fixed electrode. Accordingly, potential differences between the movable electrode and the detecting fixed electrode and between the movable electrode and the sensitivity controlling fixed electrode are independently controlled to control sensitivity of acceleration.