发明授权
- 专利标题： Semiconductor physical quantity sensor having movable portion and fixed portion confronted each other and method of manufacturing the same
- 专利标题（中）： 具有可动部分和固定部分的半导体物理量传感器彼此面对并且其制造方法
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申请号： US09438293申请日： 1999-11-12
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公开(公告)号： US06276207B1公开(公告)日： 2001-08-21
- 发明人: Minekazu Sakai , Yukihiro Takeuchi , Inao Toyoda , Seiichiro Ishio , Toshimasa Yamamoto , Eishi Kawasaki , Minoru Murata , Hiroshi Muto
- 申请人： Minekazu Sakai , Yukihiro Takeuchi , Inao Toyoda , Seiichiro Ishio , Toshimasa Yamamoto , Eishi Kawasaki , Minoru Murata , Hiroshi Muto
- 优先权： JP10-323748 19981113; JP11-262319 19990916
- 主分类号： G01P1500
- IPC分类号： G01P1500
摘要：
A semiconductor acceleration sensor, which prevents an adhesion of a movable portion to a fixed portion due to an electrostatic force generated during being handled. The acceleration sensor has a sensor portion and a handling portion. The sensor portion has a first semiconductor layer; a movable portion including a weight portion supported to the first semiconductor layer for moving in accordance with an acceleration externally applied thereto and movable electrodes integrally formed with the weight portion; and fixed electrodes having a detection surface confronted to a detection surface of the movable electrodes and supported to the first semiconductor layer. The handling portion is to be contacted during being handled, and is provided at surrounding portion of the sensor portion with a trench interposed therebetween. The sensor portion is electrically insulated from the handling portion by the trench.
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