Invention Grant
- Patent Title: Probe holder for low current measurements
- Patent Title (中): 用于低电流测量的探头支架
-
Application No.: US81518201Application Date: 2001-03-22
-
Publication No.: US6384615B2Publication Date: 2002-05-07
- Inventor: SCHWINDT RANDY
- Applicant: CASCADE MICROTECH INC
- Priority: US86428797 1997-05-28
- Main IPC: G01R1/073
- IPC: G01R1/073 ; G01R1/067 ; G01R19/00 ; G01R31/28 ; G01R35/00 ; H01L21/66 ; H01R11/18 ; G01R1/06

Abstract:
A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device.
Information query