发明授权
- 专利标题: Gas discharge laser long life electrodes
- 专利标题(中): 气体放电激光长寿命电极
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申请号: US09590961申请日: 2000-06-09
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公开(公告)号: US06466602B1公开(公告)日: 2002-10-15
- 发明人: Vladimir B. Fleurov , Michael C. Cates , Michael Du'Lyea , Igor V. Fomenkov , Dmitri V. Gaidarenko , Jean-Marc Hueber , Richard G. Morton , Eckehard D. Onkels , Robert A. Shannon , Ross H. Winnick
- 申请人: Vladimir B. Fleurov , Michael C. Cates , Michael Du'Lyea , Igor V. Fomenkov , Dmitri V. Gaidarenko , Jean-Marc Hueber , Richard G. Morton , Eckehard D. Onkels , Robert A. Shannon , Ross H. Winnick
- 主分类号: H01S3097
- IPC分类号: H01S3097
摘要:
A gas discharge laser having a laser chamber with two elongated erodable electrode elements, each having an erodable section and an electrode with support configured to minimize discharge region laser gas turbulence and with the electrode elements being configured to permit gradual erosion over more than 8 billion pulses without causing substantial changes in the shape of electrical discharges between the electrode elements. A pulse power system provides electrical pulses of at least 2J at rates of at least 2 KHz. A blower circulates laser gas between the electrodes at speeds of at least 2 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.