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公开(公告)号:US06466602B1
公开(公告)日:2002-10-15
申请号:US09590961
申请日:2000-06-09
申请人: Vladimir B. Fleurov , Michael C. Cates , Michael Du'Lyea , Igor V. Fomenkov , Dmitri V. Gaidarenko , Jean-Marc Hueber , Richard G. Morton , Eckehard D. Onkels , Robert A. Shannon , Ross H. Winnick
发明人: Vladimir B. Fleurov , Michael C. Cates , Michael Du'Lyea , Igor V. Fomenkov , Dmitri V. Gaidarenko , Jean-Marc Hueber , Richard G. Morton , Eckehard D. Onkels , Robert A. Shannon , Ross H. Winnick
IPC分类号: H01S3097
CPC分类号: G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0385 , H01S3/0387 , H01S3/041 , H01S3/0979 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225
摘要: A gas discharge laser having a laser chamber with two elongated erodable electrode elements, each having an erodable section and an electrode with support configured to minimize discharge region laser gas turbulence and with the electrode elements being configured to permit gradual erosion over more than 8 billion pulses without causing substantial changes in the shape of electrical discharges between the electrode elements. A pulse power system provides electrical pulses of at least 2J at rates of at least 2 KHz. A blower circulates laser gas between the electrodes at speeds of at least 2 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
摘要翻译: 一种气体放电激光器,其具有具有两个细长可蚀电极元件的激光室,每个具有可蚀刻部分和具有支撑件的电极,其配置为使放电区域激光气体湍流最小化,并且电极元件被配置为允许在超过80亿个脉冲 而不会引起电极元件之间放电形状的显着变化。 脉冲功率系统以至少2KHz的速率提供至少2J的电脉冲。 鼓风机以至少2m / s的速度在电极之间循环激光气体,并且提供热交换器以去除由鼓风机和排出物产生的热量。
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公开(公告)号:US06317447B1
公开(公告)日:2001-11-13
申请号:US09490835
申请日:2000-01-25
申请人: William N. Partlo , Igor V. Fomenkov , Jean-Marc Hueber , Zsolt Bor , Eckehard D. Onkels , Michael C. Cates , Richard C. Ujazdowski , Vladimir B. Fleurov , Dmitri V. Gaidarenko
发明人: William N. Partlo , Igor V. Fomenkov , Jean-Marc Hueber , Zsolt Bor , Eckehard D. Onkels , Michael C. Cates , Richard C. Ujazdowski , Vladimir B. Fleurov , Dmitri V. Gaidarenko
IPC分类号: H01S322
CPC分类号: G03F7/70025 , G03F7/70575 , G03F7/708 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382
摘要: Methods and structural changes in gas discharge lasers for minimizing wavelength chirp at high pulse rates. Applicants have identified the major cause of wavelength chirp in high pulse rate gas discharge lithography lasers as pressure waves from a discharge reflecting back to the discharge region coincident with a subsequent discharge. The timing of the arrival of the pressure wave is determined by the temperature of the laser gas through which the wave is traveling. During burst mode operation, the laser gas temperature in prior art lasers changes by several degrees over periods of a few milliseconds. These changing temperatures change the location of the coincident pressure waves from pulse to pulse within the discharge region causing a variation in the pressure of the laser gas which in turn affects the index of refraction of the discharge region causing the laser beam exiting the rear of the laser to slightly change direction. This change in beam direction causes the grating in the LNP to reflect back to the discharge region light at a slightly different wavelength causing the wavelength chirp. Solution to the problem is to include in the laser chamber structural elements to moderate or disperse the pressure waves and to maintain the laser gas temperature as close as feasible to constant values.
摘要翻译: 气体放电激光器的方法和结构变化,以最大限度地减少高脉冲波长啁啾。 申请人已经确定了在高脉冲气体放电光刻激光器中的波长啁啾的主要原因,因为从反射回到放电区域的放电的压力波与随后的放电一致。 压力波的到达时间由波浪行进的激光气体的温度决定。 在突发模式操作期间,现有技术的激光器中的激光气体温度在几毫秒的时间内改变了几度。 这些变化的温度改变了放电区域内重合压力波从脉冲到脉冲的位置,导致激光气体的压力变化,这反过来影响放电区域的折射率,导致激光束离开 激光稍微改变方向。 光束方向的这种变化导致LNP中的光栅以稍微不同的波长反射回到放电区域,导致波长啁啾。 解决问题的方法是在激光室结构元件中包括中压或分散压力波,并将激光气体温度保持在尽可能接近的恒定值。
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