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公开(公告)号：US20110043785A1
公开(公告)日：2011-02-24
申请号：US12543330
申请日：2009-08-18
IPC分类号： G01P3/36
摘要： A multifunction light detection and ranging (LIDAR) system for aircraft or other applications may use autodyne techniques. An autodyne system can use a single laser source and a single detector. The autodyne technique can mix two signal beams to produce a “beat note” at the frequency difference between the beams. Autodyne detection can leverage photon counting to support significantly reduced system complexity. Reduced complexity may provide solutions with significantly reduced power consumption, lighter weight, smaller volume, and lower cost. The multifunction LIDAR system can detect and identify regions of weather hazards such as lightning storms, aircraft wake vortex, clear air turbulence, and wind shear. The multifunction LIDAR system may also be configured to measure aircraft air and ground speed in multiple dimensions as well as aircraft altitude.
摘要翻译： 用于飞机或其他应用的多功能光检测和测距（LIDAR）系统可以使用自动旋转技术。 自动旋转系统可以使用单个激光源和单个检测器。 自动对焦技术可以混合两个信号光束，以在光束之间的频率差产生“拍音”。 自动检测可以利用光子计数来显着降低系统复杂度。 降低复杂性可提供显着降低功耗，重量更轻，体积更小，成本更低的解决方案。 多功能激光雷达系统可以检测和识别雷电风暴，飞机尾流涡流，清澈空气湍流和风切变等天气危害区域。 多功能激光雷达系统还可以被配置成在多个维度以及飞机高度上测量飞机的空中和地面速度。
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公开(公告)号：US06654403B2
公开(公告)日：2003-11-25
申请号：US09748317
申请日：2000-12-22
IPC分类号： H01S3097
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/708 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0385 , H01S3/0387 , H01S3/0979 , H01S3/223 , H01S3/225
摘要： An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and a set of long life electrode structures. At least one of the electrode structures has an erosion pad and a cross section shape designed to provide in conjunction with other chamber structure a gradual increasing flow cross section between the discharge region and the circulating tangential fan blade. In a preferred embodiment, electrode lifetime is increased by annealing the erosion rod after it is are machined. This annealing relieves the surface stress caused by the machining operation and reduces the exposed metallic grain boundary length per unit area on the surface of the electrodes, which provides substantial reduction in erosion caused by fluorine chemical attack. Annealing after machining also reduces the stress throughout the bulk of the electrode material. In preferred embodiments the anode is a copper-aluminum alloy and the cathode is a copper-zinc alloy.
摘要翻译： 具有激光室的准分子激光器，其包含含有氟的循环激光气体和一组长寿命的电极结构。 电极结构中的至少一个具有冲蚀焊盘和横截面形状，其设计成与其他腔室结构一起提供在放电区域和循环切向风扇叶片之间逐渐增加的流动横截面。 在优选的实施方案中，通过在侵蚀棒被加工之后对其进行退火来增加电极寿命。 该退火减轻了加工操作引起的表面应力，降低了电极表面单位面积暴露的金属晶界长度，大大减少了氟化学侵蚀引起的侵蚀。 加工后的退火也可以减少整个电极材料的应力。 在优选实施例中，阳极是铜 - 铝合金，阴极是铜 - 锌合金。
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公开(公告)号：US5194723A
公开(公告)日：1993-03-16
申请号：US813866
申请日：1991-12-24
申请人： Michael C. Cates , Richard R. Hamm
发明人： Michael C. Cates , Richard R. Hamm
IPC分类号： G01N29/24
CPC分类号： G01N29/2418 , G01N2291/0423
摘要： The present invention provides an automated system and method for removing one or more layers of a material from a substrate. The system and method include irradiating a structure comprising at least one layer of material formed on a substrate with a light beam having an intensity sufficient to ablate the materials in order to expose selected regions of the substrate, where the ablated material generates photoacoustic signature signals; scanning the structure with the light beam along a predetermined path at a scan speed; detecting the photoacoustic signature signals; determining an updated scan speed functionally related to the detected photoacoustic signals; and directing the scan speed to be equal to the updated scan speed. Another embodiment exposes a selected layer of a multilayered structure in a process which includes irradiating the surface of multilayered structure at a first location with a light beam having sufficient intensity to ablate the irradiated layer and generate photoacoustic pressure wave signals; detecting the photoacoustic pressure wave signals generated at the irradiated surface; comparing representations of the photoacoustic pressure wave signals with a reference value corresponding to a photoacoustic signature signal of a layer of the structure selected to be exposed; and directing the light source to scan the surface of the structure at a scan speed functionally related to the difference between the photoacoustic pressure wave signals and the reference value.
摘要翻译： 本发明提供一种用于从衬底去除材料的一层或多层的自动化系统和方法。 该系统和方法包括用形成在衬底上的至少一层材料的结构照射具有足以消融材料的强度的光束，以暴露衬底的选定区域，其中消融材料产生光声特征信号; 以扫描速度沿预定路径用光束扫描结构; 检测光声签名信号; 确定与检测到的光声信号功能相关的更新的扫描速度; 并且将扫描速度定向为等于更新的扫描速度。 另一实施例在包括用第一位置的多层结构的表面照射具有足够强度的光束以消融辐照层并产生光声压波信号的过程中暴露多层结构的选定层; 检测在所照射的表面产生的光声压力波信号; 将光声压力波信号的表示与对应于被选择曝光的结构的层的光声签名信号相对应的参考值进行比较; 并且引导光源以与光声压波信号和参考值之间的差异功能相关的扫描速度扫描结构的表面。
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公开(公告)号：US08508721B2
公开(公告)日：2013-08-13
申请号：US12543330
申请日：2009-08-18
IPC分类号： G01C3/08
摘要： A multifunction light detection and ranging (LIDAR) system for aircraft or other applications may use autodyne techniques. An autodyne system can use a single laser source and a single detector. The autodyne technique can mix two signal beams to produce a “beat note” at the frequency difference between the beams. Autodyne detection can leverage photon counting to support significantly reduced system complexity. Reduced complexity may provide solutions with significantly reduced power consumption, lighter weight, smaller volume, and lower cost. The multifunction LIDAR system can detect and identify regions of weather hazards such as lightning storms, aircraft wake vortex, clear air turbulence, and wind shear. The multifunction LIDAR system may also be configured to measure aircraft air and ground speed in multiple dimensions as well as aircraft altitude.
摘要翻译： 用于飞机或其他应用的多功能光检测和测距（LIDAR）系统可以使用自动旋转技术。 自动旋转系统可以使用单个激光源和单个检测器。 自动对焦技术可以混合两个信号光束，以在光束之间的频率差产生“拍音”。 自动检测可以利用光子计数来显着降低系统复杂度。 降低复杂性可提供显着降低功耗，重量更轻，体积更小，成本更低的解决方案。 多功能激光雷达系统可以检测和识别雷电风暴，飞机尾流涡流，清澈空气湍流和风切变等天气危害区域。 多功能激光雷达系统还可以被配置成在多个维度以及飞机高度上测量飞机的空中和地面速度。
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公开(公告)号：US06414979B2
公开(公告)日：2002-07-02
申请号：US09768753
申请日：2001-01-23
申请人： Richard C. Ujazdowski , Michael C. Cates , Richard G. Morton , Jean-Marc Hueber , Ross H. Winnick
发明人： Richard C. Ujazdowski , Michael C. Cates , Richard G. Morton , Jean-Marc Hueber , Ross H. Winnick
IPC分类号： H01S3097
CPC分类号： G03F7/70933 , G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0385 , H01S3/0387 , H01S3/041 , H01S3/0979 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225
摘要： A gas discharge laser having a laser chamber with two elongated erodable electrode elements, at least one of said electrode element having a generally blunt blade-shaped portion comprised of a material having high electrical conductivity with a flow shaping dielectric fairing positioned on each of two sides of said blunt blade-shaped portion. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 10 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
摘要翻译： 一种气体放电激光器，其具有具有两个细长的可蚀电极元件的激光室，所述电极元件中的至少一个具有大致钝的刀片形部分，其由具有高导电性的材料组成，并且流动成形电介质整流罩位于两侧 的所述钝刀形部分。 脉冲功率系统以至少1KHz的速率提供电脉冲。 鼓风机以至少10m / s的速度在电极之间循环激光气体，并且提供热交换器以去除由鼓风机和排出物产生的热量。
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6.发明授权
公开(公告)号：US5512123A
公开(公告)日：1996-04-30
申请号：US300389
申请日：1994-09-02
申请人： Michael C. Cates , Richard R. Hamm , Edmond Chu
发明人： Michael C. Cates , Richard R. Hamm , Edmond Chu
CPC分类号： B08B7/0035 , B05D3/044 , B05D3/0446 , B05D3/06 , B29C59/00 , B29C59/16 , B32B38/0008 , C09J5/02 , B29C2035/0827
摘要： A method and system for improving the capability of a surface of an organic structure to bond with another material includes irradiating a target area of the surface of a structure with pulsed, incoherent optical energy having wavelength components which range from 160-5000 nanometers at an intensity sufficient to photodecompose any adventitious organic substances on the surface and to photodecompose a thin layer of molecular bonds forming the surface of the structure; and exposing the target area of the surface to ionized gas that chemically reacts with the target area of the surface to increase the surface free energy of the surface. A similar method and system may also be employed to improve the bondability of a metallic surface by first precleaning the metallic surface to dislodge any inorganic substances from the surface; and second irradiating a target area of the surface with pulsed, incoherent optical energy having wavelength components in the range of 160-5000 nanometers at an intensity sufficient to photodecompose any organic substances present on the surface.
摘要翻译： 用于提高有机结构的表面与另一种材料结合的能力的方法和系统包括用具有波长分量的脉冲非相干光能照射结构表面的目标区域，其强度范围为160-5000纳米 足以光刻地分解表面上的任何不定的有机物质并且光分解形成结构表面的薄层分子键; 并将表面的目标区域暴露于与表面的目标区域化学反应的电离气体，以增加表面的表面自由能。 也可以采用类似的方法和系统来通过首先预清洁金属表面以从表面去除任何无机物质来改善金属表面的粘合性; 并且以足以对所述表面上存在的任何有机物质进行光分解的强度，以具有160-5000纳米范围内的波长分量的脉冲非相干光能，第二次照射所述表面的目标区域。
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7.发明授权Method and system for removing a coating from a substrate using radiant energy and a particle stream 失效使用辐射能和粒子流从基板去除涂层的方法和系统
公开(公告)号：US5328517A
公开(公告)日：1994-07-12
申请号：US813872
申请日：1991-12-24
CPC分类号： B24C1/086 , B08B7/0035 , B23K26/144 , B24C1/003 , B44D3/166
摘要： A method is provided for removing material from a structure having at least one layer of material formed on a substrate. The method includes the steps of irradiating a target area of a structure with radiant energy sufficient to break or weaken chemical bonds in the material, and impinging the target area with a particle stream to remove the pyrolyzed material from the structure. The method may be implemented by a system comprising a housing having a window; a radiant energy source mounted in the housing for irradiating the target area of the structure with the radiant energy; and a nozzle mounted to the exterior of the housing for directing the stream of particles at the target area.
摘要翻译： 提供了一种用于从具有在衬底上形成的至少一层材料的结构去除材料的方法。 该方法包括以下步骤：用足以破坏或削弱材料中的化学键的辐射能照射结构的目标区域，以及用颗粒流冲击目标区域以从结构中去除热解的材料。 该方法可以由包括具有窗口的壳体的系统来实现; 安装在所述壳体中的辐射能源，用于以所述辐射能照射所述结构的目标区域; 以及安装到壳体外部的喷嘴，用于将粒子流引导到目标区域。
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8.发明授权Method and system for control of a material removal process using spectral emission discrimination 失效使用光谱发射识别来控制材料去除过程的方法和系统
公开(公告)号：US5204517A
公开(公告)日：1993-04-20
申请号：US813865
申请日：1991-12-24
CPC分类号： B44D3/166 , B23K26/40 , B23K26/402 , B23K26/705 , B23K2203/172 , B23K2203/42
摘要： A method for removing material from a structure, comprising the steps of: (1) generating a light beam; (2) irradiating the surface material of a structure with the light beam having an intensity sufficient to ablate the surface material and to cause the surface material to generate spectral emission signals having intensities; (3) scanning the structure with the light beam at a scan speed; (4) monitoring the spectral emissions to detect a selected one of the spectral emission signals having a selected wavelength and generating an electronic output signal representative of the intensity of a selected one of the spectral emission signals in response to detecting the selected one of the spectral emission signals; (5) determining an updated scan speed functionally related to the electronic output signal; and (6) directing the scan speed to be equal to the updated scan speed. A second embodiment determines the updated scan speed based on the intensity of spectral emission signals detected during predetermined intervals while the structure is illuminated by the light source. A third embodiment determines an updated scan speed based on the intensity of spectral emission signals resulting from a laser pulse irradiating the structure when the output of the light beam is approximately at a minimum.
摘要翻译： 一种从结构中去除材料的方法，包括以下步骤：（1）产生光束; （2）利用具有足以烧蚀表面材料的强度的光束照射结构的表面材料，并使表面材料产生具有强度的光谱发射信号; （3）以扫描速度用光束扫描结构; （4）监测光谱发射以检测具有所选波长的所选频谱发射信号中的一个，并且响应于检测到所选择的光谱中的一个，产生表示所选择的一个频谱发射信号的强度的电子输出信号 发射信号; （5）确定与电子输出信号功能相关的更新的扫描速度; 和（6）将扫描速度指示为等于更新的扫描速度。 第二实施例基于在由光源照射结构的预定间隔期间检测到的光谱发射信号的强度来确定更新的扫描速度。 第三实施例基于当光束的输出大致为最小时由照射该结构的激光脉冲产生的光谱发射信号的强度来确定更新的扫描速度。
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公开(公告)号：US06466602B1
公开(公告)日：2002-10-15
申请号：US09590961
申请日：2000-06-09
申请人： Vladimir B. Fleurov , Michael C. Cates , Michael Du'Lyea , Igor V. Fomenkov , Dmitri V. Gaidarenko , Jean-Marc Hueber , Richard G. Morton , Eckehard D. Onkels , Robert A. Shannon , Ross H. Winnick
发明人： Vladimir B. Fleurov , Michael C. Cates , Michael Du'Lyea , Igor V. Fomenkov , Dmitri V. Gaidarenko , Jean-Marc Hueber , Richard G. Morton , Eckehard D. Onkels , Robert A. Shannon , Ross H. Winnick
IPC分类号： H01S3097
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0385 , H01S3/0387 , H01S3/041 , H01S3/0979 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225
摘要： A gas discharge laser having a laser chamber with two elongated erodable electrode elements, each having an erodable section and an electrode with support configured to minimize discharge region laser gas turbulence and with the electrode elements being configured to permit gradual erosion over more than 8 billion pulses without causing substantial changes in the shape of electrical discharges between the electrode elements. A pulse power system provides electrical pulses of at least 2J at rates of at least 2 KHz. A blower circulates laser gas between the electrodes at speeds of at least 2 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
摘要翻译： 一种气体放电激光器，其具有具有两个细长可蚀电极元件的激光室，每个具有可蚀刻部分和具有支撑件的电极，其配置为使放电区域激光气体湍流最小化，并且电极元件被配置为允许在超过80亿个脉冲 而不会引起电极元件之间放电形状的显着变化。 脉冲功率系统以至少2KHz的速率提供至少2J的电脉冲。 鼓风机以至少2m / s的速度在电极之间循环激光气体，并且提供热交换器以去除由鼓风机和排出物产生的热量。
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公开(公告)号：US06317447B1
公开(公告)日：2001-11-13
申请号：US09490835
申请日：2000-01-25
申请人： William N. Partlo , Igor V. Fomenkov , Jean-Marc Hueber , Zsolt Bor , Eckehard D. Onkels , Michael C. Cates , Richard C. Ujazdowski , Vladimir B. Fleurov , Dmitri V. Gaidarenko
发明人： William N. Partlo , Igor V. Fomenkov , Jean-Marc Hueber , Zsolt Bor , Eckehard D. Onkels , Michael C. Cates , Richard C. Ujazdowski , Vladimir B. Fleurov , Dmitri V. Gaidarenko
IPC分类号： H01S322
CPC分类号： G03F7/70025 , G03F7/70575 , G03F7/708 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382
摘要： Methods and structural changes in gas discharge lasers for minimizing wavelength chirp at high pulse rates. Applicants have identified the major cause of wavelength chirp in high pulse rate gas discharge lithography lasers as pressure waves from a discharge reflecting back to the discharge region coincident with a subsequent discharge. The timing of the arrival of the pressure wave is determined by the temperature of the laser gas through which the wave is traveling. During burst mode operation, the laser gas temperature in prior art lasers changes by several degrees over periods of a few milliseconds. These changing temperatures change the location of the coincident pressure waves from pulse to pulse within the discharge region causing a variation in the pressure of the laser gas which in turn affects the index of refraction of the discharge region causing the laser beam exiting the rear of the laser to slightly change direction. This change in beam direction causes the grating in the LNP to reflect back to the discharge region light at a slightly different wavelength causing the wavelength chirp. Solution to the problem is to include in the laser chamber structural elements to moderate or disperse the pressure waves and to maintain the laser gas temperature as close as feasible to constant values.
摘要翻译： 气体放电激光器的方法和结构变化，以最大限度地减少高脉冲波长啁啾。 申请人已经确定了在高脉冲气体放电光刻激光器中的波长啁啾的主要原因，因为从反射回到放电区域的放电的压力波与随后的放电一致。 压力波的到达时间由波浪行进的激光气体的温度决定。 在突发模式操作期间，现有技术的激光器中的激光气体温度在几毫秒的时间内改变了几度。 这些变化的温度改变了放电区域内重合压力波从脉冲到脉冲的位置，导致激光气体的压力变化，这反过来影响放电区域的折射率，导致激光束离开 激光稍微改变方向。 光束方向的这种变化导致LNP中的光栅以稍微不同的波长反射回到放电区域，导致波长啁啾。 解决问题的方法是在激光室结构元件中包括中压或分散压力波，并将激光气体温度保持在尽可能接近的恒定值。
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