发明授权
- 专利标题： Inspection system and method for manufacturing electronic devices using the inspection system
- 专利标题（中）： 使用检查系统制造电子设备的检查系统和方法
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申请号： US09389230申请日： 1999-09-03
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公开(公告)号： US06611728B1公开(公告)日： 2003-08-26
- 发明人: Natsuyo Morioka , Hisafumi Iwata , Junko Konishi , Yoko Ikeda , Kazunori Nemoto , Makoto Ono , Yasuhiro Yoshitake
- 申请人： Natsuyo Morioka , Hisafumi Iwata , Junko Konishi , Yoko Ikeda , Kazunori Nemoto , Makoto Ono , Yasuhiro Yoshitake
- 优先权： JP10-249303 19980903; JP10-249935 19980903
- 主分类号： G06F1900
- IPC分类号： G06F1900
摘要：
An inspection system comprises an inspection machine for inspecting a work which is processed in one of the manufacturing processes of a manufacturing line and an analysis system for outputting an inspection history list obtained by making calculations from the inspected result. The inspection history list shows a matrix of first information as the inspection processes in which the work is inspected or the manufacturing processes corresponding to the inspection processes in which the work is inspected and second information as to the works inspected by the inspection machine.